TY - GEN
T1 - A Reliable Liquid-Based Highly Sensitive Micro Thermoresistive Convective Accelerometer by Using 0.35 μm CMOS MEMS Technology
AU - Wang, Xiaoyi
AU - Xu, Wei
AU - Lim, Gyuha
AU - Lee, Yi Kuen
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/1
Y1 - 2020/1
N2 - In this paper, the Rayleigh-number (Ra) based compact model was used to design and fabricate a reliable liquid-based micro thermosensitive convective accelerometer (MTCA) with dual-differential-detectors (DD) design using the 0.35μm CMOS MEMS technology with a two-order-of-magnitude increase in sensitivity (43.8mV/g, gain=1) compared with the-state-of-art MTCA. Aluminum with higher temperature coefficient of resistance (TCR, α=3.3× 10-3/K) is adopted as the sensing material instead of polysilicon (0.9× 10-3/K). Besides, the DD design is implemented to double the output compared with the conventional single-differential-detector (SD) design. Furthermore, the Parylene-C is used for reliable conformal water-proof coating ca 9-year-lifetime) for MTCA, resulting in excellent normalized sensitivity using alcohol (3, 344 μ V/g/mW) as the working fluid. Nonlinear MTCA responses using different working fluids are revealed both theoretically and experimentally, useful for design optimization of MTCA.
AB - In this paper, the Rayleigh-number (Ra) based compact model was used to design and fabricate a reliable liquid-based micro thermosensitive convective accelerometer (MTCA) with dual-differential-detectors (DD) design using the 0.35μm CMOS MEMS technology with a two-order-of-magnitude increase in sensitivity (43.8mV/g, gain=1) compared with the-state-of-art MTCA. Aluminum with higher temperature coefficient of resistance (TCR, α=3.3× 10-3/K) is adopted as the sensing material instead of polysilicon (0.9× 10-3/K). Besides, the DD design is implemented to double the output compared with the conventional single-differential-detector (SD) design. Furthermore, the Parylene-C is used for reliable conformal water-proof coating ca 9-year-lifetime) for MTCA, resulting in excellent normalized sensitivity using alcohol (3, 344 μ V/g/mW) as the working fluid. Nonlinear MTCA responses using different working fluids are revealed both theoretically and experimentally, useful for design optimization of MTCA.
KW - CMOS MEMS
KW - Liquid Fluid
KW - Micro Thermal Convective Accelerometer
KW - Parylene-C coating
UR - http://www.scopus.com/inward/record.url?scp=85083215550&partnerID=8YFLogxK
U2 - 10.1109/MEMS46641.2020.9056154
DO - 10.1109/MEMS46641.2020.9056154
M3 - Conference contribution
AN - SCOPUS:85083215550
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 745
EP - 748
BT - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Y2 - 18 January 2020 through 22 January 2020
ER -