TY - JOUR
T1 - A PZT-Driven 6-DOF High-Speed Micromanipulator for Circular Vibration Simulation and Whirling Flow Generation
AU - Luo, Weikun
AU - Liu, Xiaoming
AU - Tang, Xiaoqing
AU - Liu, Dan
AU - Kojima, Masaru
AU - Huang, Qiang
AU - Arai, Tatsuo
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2022/10/1
Y1 - 2022/10/1
N2 - Existing micromanipulation methods, whether contact micromanipulation or non-contact micromanipulation, can hardly meet the requirements of low damage and multiple functions in the biomedical field. This study provides a high-speed micromanipulator that can simulate circular vibrations and generate microflow, which could be utilized to actuate non-invasive multiple operations of biological targets at the microscale. We design a PZT-driven 6-DOF micromanipulator with a hybrid structure and flexible hinges. Two 3-PRS parallel modules are serially connected in mirror style to achieve high speed, high accuracy, and a big workspace simultaneously, which enables the highly-controllable circular vibration simulation and strong whirling flow generation. The static, dynamic, and trajectory tracking performances were evaluated. The experimental result showed the 324 × 331 × 40 μm3 workspace, which was also the range of trajectories that could be generated. Trajectory tracking performance evaluation showed that it could realize ∼200 Hz circular vibration with an error of about 2.4% through open-loop control. Finally, the microflow generation experiment indicated the great potential of the proposed micromanipulator and the method of whirling flow generation in operating the biological targets at the microscale.
AB - Existing micromanipulation methods, whether contact micromanipulation or non-contact micromanipulation, can hardly meet the requirements of low damage and multiple functions in the biomedical field. This study provides a high-speed micromanipulator that can simulate circular vibrations and generate microflow, which could be utilized to actuate non-invasive multiple operations of biological targets at the microscale. We design a PZT-driven 6-DOF micromanipulator with a hybrid structure and flexible hinges. Two 3-PRS parallel modules are serially connected in mirror style to achieve high speed, high accuracy, and a big workspace simultaneously, which enables the highly-controllable circular vibration simulation and strong whirling flow generation. The static, dynamic, and trajectory tracking performances were evaluated. The experimental result showed the 324 × 331 × 40 μm3 workspace, which was also the range of trajectories that could be generated. Trajectory tracking performance evaluation showed that it could realize ∼200 Hz circular vibration with an error of about 2.4% through open-loop control. Finally, the microflow generation experiment indicated the great potential of the proposed micromanipulator and the method of whirling flow generation in operating the biological targets at the microscale.
KW - Micromanipulators
KW - Parallel robots
KW - Piezoelectric actuators
KW - Whirling flow generation
UR - http://www.scopus.com/inward/record.url?scp=85135224604&partnerID=8YFLogxK
U2 - 10.1109/LRA.2022.3192768
DO - 10.1109/LRA.2022.3192768
M3 - Article
AN - SCOPUS:85135224604
SN - 2377-3766
VL - 7
SP - 9849
EP - 9855
JO - IEEE Robotics and Automation Letters
JF - IEEE Robotics and Automation Letters
IS - 4
ER -