A PZT-Driven 6-DOF High-Speed Micromanipulator for Circular Vibration Simulation and Whirling Flow Generation

Weikun Luo, Xiaoming Liu*, Xiaoqing Tang, Dan Liu, Masaru Kojima, Qiang Huang, Tatsuo Arai

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Existing micromanipulation methods, whether contact micromanipulation or non-contact micromanipulation, can hardly meet the requirements of low damage and multiple functions in the biomedical field. This study provides a high-speed micromanipulator that can simulate circular vibrations and generate microflow, which could be utilized to actuate non-invasive multiple operations of biological targets at the microscale. We design a PZT-driven 6-DOF micromanipulator with a hybrid structure and flexible hinges. Two 3-PRS parallel modules are serially connected in mirror style to achieve high speed, high accuracy, and a big workspace simultaneously, which enables the highly-controllable circular vibration simulation and strong whirling flow generation. The static, dynamic, and trajectory tracking performances were evaluated. The experimental result showed the 324 × 331 × 40 μm3 workspace, which was also the range of trajectories that could be generated. Trajectory tracking performance evaluation showed that it could realize ∼200 Hz circular vibration with an error of about 2.4% through open-loop control. Finally, the microflow generation experiment indicated the great potential of the proposed micromanipulator and the method of whirling flow generation in operating the biological targets at the microscale.

Original languageEnglish
Pages (from-to)9849-9855
Number of pages7
JournalIEEE Robotics and Automation Letters
Volume7
Issue number4
DOIs
Publication statusPublished - 1 Oct 2022

Keywords

  • Micromanipulators
  • Parallel robots
  • Piezoelectric actuators
  • Whirling flow generation

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