A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

Haoran Wang; Mengyuan Li; Yuanyuan Yu; Zhenfang Chen; Yingtao DIng; Huabei Jiang; Huikai Xie

doi:10.1109/TRANSDUCERS.2019.8808528

A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

Haoran Wang, Mengyuan Li, Yuanyuan Yu, Zhenfang Chen, Yingtao DIng, Huabei Jiang, Huikai Xie

School of Integrated Circuits and Electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

14 Citations (Scopus)

Abstract

This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 μm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	857-860
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808528
Publication status	Published - Jun 2019
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	23/06/19 → 27/06/19

Keywords

MEMS speaker
ceramic PZT
loud speaker
microspeaker
piezoelectric

Access to Document

10.1109/TRANSDUCERS.2019.8808528

Cite this

Wang, H., Li, M., Yu, Y., Chen, Z., DIng, Y., Jiang, H., & Xie, H. (2019). A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 857-860). Article 8808528 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808528

Wang, Haoran ; Li, Mengyuan ; Yu, Yuanyuan et al. / A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 857-860 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{d89bf2ef6d6f450cb045c664e1248fd5,

title = "A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT",

abstract = "This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 μm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.",

keywords = "MEMS speaker, ceramic PZT, loud speaker, microspeaker, piezoelectric",

author = "Haoran Wang and Mengyuan Li and Yuanyuan Yu and Zhenfang Chen and Yingtao DIng and Huabei Jiang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808528",

language = "English",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "857--860",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

address = "United States",

}

Wang, H, Li, M, Yu, Y, Chen, Z, DIng, Y, Jiang, H & Xie, H 2019, A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808528, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 857-860, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808528

A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. / Wang, Haoran; Li, Mengyuan; Yu, Yuanyuan et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 857-860 8808528 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

AU - Wang, Haoran

AU - Li, Mengyuan

AU - Yu, Yuanyuan

AU - Chen, Zhenfang

AU - DIng, Yingtao

AU - Jiang, Huabei

AU - Xie, Huikai

PY - 2019/6

Y1 - 2019/6

N2 - This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 μm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.

AB - This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 μm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.

KW - MEMS speaker

KW - ceramic PZT

KW - loud speaker

KW - microspeaker

KW - piezoelectric

UR - http://www.scopus.com/inward/record.url?scp=85071906368&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2019.8808528

DO - 10.1109/TRANSDUCERS.2019.8808528

M3 - Conference contribution

AN - SCOPUS:85071906368

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 857

EP - 860

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Wang H, Li M, Yu Y, Chen Z, DIng Y, Jiang H et al. A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 857-860. 8808528. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808528

A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this