@inproceedings{9309c76e5489416d9c2dc0d9ef7a1153,
title = "A Photosensitive Polyimide-SiO2Bimorph based Electrothermal Micromirror with High Impact Resistance",
abstract = "Resistance to impact damage is highly favored in hand-held optical scanning applications. In this work, a lateral-shift-free (LSF) electrothermal micromirror with high impact resistance is proposed and fabricated. The high impact resistance is achieved by employing photosensitive polyimide (PSPI) and SiO2 to construct the bimorph actuators. Experiments show that compared with previous LSF electrothermal micromirrors, the impact resistance is increased by about 20 times. In addition, the power efficiency of the new micromirror is doubled due to the good thermal isolation provided by PSPI. This new type of micromirrors is a promising candidate in hand-held and long-time scanning applications, including LIDAR and optical endoscopic probes.",
keywords = "Electrothermal, MEMS, Micromirror, Multimorph",
author = "Hengzhang Yang and Anrun Ren and Yingtao Ding and Yao Lu and Teng Pan and Xiaoyi Wang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",
year = "2024",
doi = "10.1109/MEMS58180.2024.10439384",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "729--732",
booktitle = "IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024",
address = "United States",
}