A parametric dynamic compact thermal model of an electrothermally actuated micromirror

Sagnik Pal; Huikai Xie

doi:10.1088/0960-1317/19/6/065007

A parametric dynamic compact thermal model of an electrothermally actuated micromirror

Sagnik Pal^*, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

A compact thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported. Thermal bimorphs with integrated platinum resistors are used for generating angular rotation. A finite element thermal model is built and validated using thermal imaging data. Using a Krylov subspace-based algorithm, a reduced-order model of order 2 is extracted from the finite element model. The reduced model agrees well with finite element results. A lumped element circuit model is used to explain the second-order thermal response.

Original language	English
Article number	065007
Journal	Journal of Micromechanics and Microengineering
Volume	19
Issue number	6
DOIs	https://doi.org/10.1088/0960-1317/19/6/065007
Publication status	Published - 2009
Externally published	Yes

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10.1088/0960-1317/19/6/065007

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abstract = "A compact thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported. Thermal bimorphs with integrated platinum resistors are used for generating angular rotation. A finite element thermal model is built and validated using thermal imaging data. Using a Krylov subspace-based algorithm, a reduced-order model of order 2 is extracted from the finite element model. The reduced model agrees well with finite element results. A lumped element circuit model is used to explain the second-order thermal response.",

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AB - A compact thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported. Thermal bimorphs with integrated platinum resistors are used for generating angular rotation. A finite element thermal model is built and validated using thermal imaging data. Using a Krylov subspace-based algorithm, a reduced-order model of order 2 is extracted from the finite element model. The reduced model agrees well with finite element results. A lumped element circuit model is used to explain the second-order thermal response.

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A parametric dynamic compact thermal model of an electrothermally actuated micromirror

Abstract

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