A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing

Xiaochen Liu; Lihao Wang; Yinfang Zhu; Junyuan Zhao; Jinying Zhang; Jinling Yang; Fuhua Yang

doi:10.1088/1361-6439/aad927

A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing

Xiaochen Liu, Lihao Wang, Yinfang Zhu^*, Junyuan Zhao, Jinying Zhang, Jinling Yang, Fuhua Yang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

This work presents a novel scanning force microscopy probe with electro-thermal actuation and piezo-resistive detection. The fabricated probe of 270 × 58 × 2.5 μm³ can generate a force between 1.05 μN and 16.52 μN with a resolution of nano-newton, and can detect the nanometer-scale deflection. The minimum detectable output signal of the probe could be down to 20 μV and the sensitivity reaches 4.92 mV μm^-1. This is a straight-forward technique for characterizing the mechanical properties of micro/nano-structures and devices.

Original language	English
Article number	115003
Journal	Journal of Micromechanics and Microengineering
Volume	28
Issue number	11
DOIs	https://doi.org/10.1088/1361-6439/aad927
Publication status	Published - 29 Aug 2018
Externally published	Yes

Keywords

MEMS probe
micro-nano structure
piezo-resistance
thermal-electrical actuation

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10.1088/1361-6439/aad927

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title = "A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing",

abstract = "This work presents a novel scanning force microscopy probe with electro-thermal actuation and piezo-resistive detection. The fabricated probe of 270 × 58 × 2.5 μm3 can generate a force between 1.05 μN and 16.52 μN with a resolution of nano-newton, and can detect the nanometer-scale deflection. The minimum detectable output signal of the probe could be down to 20 μV and the sensitivity reaches 4.92 mV μm-1. This is a straight-forward technique for characterizing the mechanical properties of micro/nano-structures and devices.",

keywords = "MEMS probe, micro-nano structure, piezo-resistance, thermal-electrical actuation",

author = "Xiaochen Liu and Lihao Wang and Yinfang Zhu and Junyuan Zhao and Jinying Zhang and Jinling Yang and Fuhua Yang",

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T1 - A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing

AU - Liu, Xiaochen

AU - Wang, Lihao

AU - Zhu, Yinfang

AU - Zhao, Junyuan

AU - Zhang, Jinying

AU - Yang, Jinling

AU - Yang, Fuhua

PY - 2018/8/29

Y1 - 2018/8/29

N2 - This work presents a novel scanning force microscopy probe with electro-thermal actuation and piezo-resistive detection. The fabricated probe of 270 × 58 × 2.5 μm3 can generate a force between 1.05 μN and 16.52 μN with a resolution of nano-newton, and can detect the nanometer-scale deflection. The minimum detectable output signal of the probe could be down to 20 μV and the sensitivity reaches 4.92 mV μm-1. This is a straight-forward technique for characterizing the mechanical properties of micro/nano-structures and devices.

AB - This work presents a novel scanning force microscopy probe with electro-thermal actuation and piezo-resistive detection. The fabricated probe of 270 × 58 × 2.5 μm3 can generate a force between 1.05 μN and 16.52 μN with a resolution of nano-newton, and can detect the nanometer-scale deflection. The minimum detectable output signal of the probe could be down to 20 μV and the sensitivity reaches 4.92 mV μm-1. This is a straight-forward technique for characterizing the mechanical properties of micro/nano-structures and devices.

KW - MEMS probe

KW - micro-nano structure

KW - piezo-resistance

KW - thermal-electrical actuation

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DO - 10.1088/1361-6439/aad927

M3 - Article

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SN - 0960-1317

VL - 28

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 11

M1 - 115003

ER -

A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing

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Keywords

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