TY - GEN
T1 - A novel multi-direction high shock reliability test on MEMS devices
AU - Lou, Wenzhong
AU - Song, Renlong
AU - Liu, Yunjian
AU - Liu, Xiaosong
AU - Li, Weihua
AU - Lin, Wanfeng
PY - 2009
Y1 - 2009
N2 - Most MEMS/NEMS devices are working on the harsh environment, such as high shock and temperature environment, ranging from aerospace science, automobile industry, mechanical engineering, to medical and safety engineering. The reliability of MEMS/NEMS devices is the most important issue today. MEMS devices must perform their required functions for the duration of the equipment's requirement profile. However, there is a need to implement standardized tests and requirements to ensure the performance of MEMS devices in fielded and emerging military systems. This paper presents the multi-direction high shock environment for MEMS devices, and introduces a dynamic test and shock response spectra (SRS) testing technology. The simulation test of shock environment based equivalent injury theory is studied. A computation program is written in software-Matlab with the modified digital filtering algorithm. The SRS of the shock signal of dispersing is calculated. Also, the simulation of the SRS of dispersing is probed into by using drop test.
AB - Most MEMS/NEMS devices are working on the harsh environment, such as high shock and temperature environment, ranging from aerospace science, automobile industry, mechanical engineering, to medical and safety engineering. The reliability of MEMS/NEMS devices is the most important issue today. MEMS devices must perform their required functions for the duration of the equipment's requirement profile. However, there is a need to implement standardized tests and requirements to ensure the performance of MEMS devices in fielded and emerging military systems. This paper presents the multi-direction high shock environment for MEMS devices, and introduces a dynamic test and shock response spectra (SRS) testing technology. The simulation test of shock environment based equivalent injury theory is studied. A computation program is written in software-Matlab with the modified digital filtering algorithm. The SRS of the shock signal of dispersing is calculated. Also, the simulation of the SRS of dispersing is probed into by using drop test.
KW - High shock
KW - MEMS devices
KW - Reliability test
KW - SRS
UR - http://www.scopus.com/inward/record.url?scp=70349693679&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2009.5068573
DO - 10.1109/NEMS.2009.5068573
M3 - Conference contribution
AN - SCOPUS:70349693679
SN - 9781424446308
T3 - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
SP - 261
EP - 264
BT - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
T2 - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Y2 - 5 January 2009 through 8 January 2009
ER -