A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel

Chengjun Qiu; Huijun Zhang; Wei Qu; Hongmei Liu; Dan Bu; Maosheng Cao

doi:10.1109/NEMS.2006.334913

A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel

Chengjun Qiu^*, Huijun Zhang, Wei Qu, Hongmei Liu, Dan Bu, Maosheng Cao

^*Corresponding author for this work

School of Material Science and Engineering

Heilongjiang University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A new microactuator design was fabricated to make a qualitative researcher on the PZT (Pb(Zr,Ti)O₃) piezoelectric thin film. A novel V type valve geometry structure enables fluid pumping. The PZT thin films were used to fabricate multi-layer driving membrane for microactuator by its piezoelectric response. As the key technology of driving membrane, the Si /SiO₂/Ti /Au /PZT/Cr/Au multi-layer film preparation on silicon substrate was developed. The microactuator consists of silicon-silicon stack and is fabricated with anisotropic etching process involving pump chamber and V type valve etching step. The SEM (scanning electron microscope) photographs of V type valve and XRD (X-ray diffraction) analysis for the multi-layer driving membrane were presented. The results show that the method of pump chamber fabricated is flat and uniform and the problem of PZT deposited on silicon substrate solved well. The single layer design of V type valve reduced the fabrication complexity and it satisfied the desires for materials retrenchment. Design and fabricated are described and discussed in this paper.

Original language	English
Title of host publication	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages	864-867
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2006.334913
Publication status	Published - 2006
Event	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China Duration: 18 Jan 2006 → 21 Jan 2006

Publication series

Name	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Conference

Conference	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Country/Territory	China
City	Zhuhai
Period	18/01/06 → 21/01/06

Keywords

Microactuator
PZT
Sol-gel
V type valve

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10.1109/NEMS.2006.334913

Cite this

Qiu, C., Zhang, H., Qu, W., Liu, H., Bu, D., & Cao, M. (2006). A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (pp. 864-867). Article 4135086 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). https://doi.org/10.1109/NEMS.2006.334913

Qiu, Chengjun ; Zhang, Huijun ; Qu, Wei et al. / A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel. Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. pp. 864-867 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

@inproceedings{722a4ddc74b24836a930fa0401ddaf2d,

title = "A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel",

abstract = "A new microactuator design was fabricated to make a qualitative researcher on the PZT (Pb(Zr,Ti)O3) piezoelectric thin film. A novel V type valve geometry structure enables fluid pumping. The PZT thin films were used to fabricate multi-layer driving membrane for microactuator by its piezoelectric response. As the key technology of driving membrane, the Si /SiO2/Ti /Au /PZT/Cr/Au multi-layer film preparation on silicon substrate was developed. The microactuator consists of silicon-silicon stack and is fabricated with anisotropic etching process involving pump chamber and V type valve etching step. The SEM (scanning electron microscope) photographs of V type valve and XRD (X-ray diffraction) analysis for the multi-layer driving membrane were presented. The results show that the method of pump chamber fabricated is flat and uniform and the problem of PZT deposited on silicon substrate solved well. The single layer design of V type valve reduced the fabrication complexity and it satisfied the desires for materials retrenchment. Design and fabricated are described and discussed in this paper.",

keywords = "Microactuator, PZT, Sol-gel, V type valve",

author = "Chengjun Qiu and Huijun Zhang and Wei Qu and Hongmei Liu and Dan Bu and Maosheng Cao",

year = "2006",

doi = "10.1109/NEMS.2006.334913",

language = "English",

isbn = "1424401402",

series = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",

pages = "864--867",

booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",

note = "1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS ; Conference date: 18-01-2006 Through 21-01-2006",

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Qiu, C, Zhang, H, Qu, W, Liu, H, Bu, D & Cao, M 2006, A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel. in Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS., 4135086, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, pp. 864-867, 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, 18/01/06. https://doi.org/10.1109/NEMS.2006.334913

A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel. / Qiu, Chengjun; Zhang, Huijun; Qu, Wei et al.
Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 864-867 4135086 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel

AU - Qiu, Chengjun

AU - Zhang, Huijun

AU - Qu, Wei

AU - Liu, Hongmei

AU - Bu, Dan

AU - Cao, Maosheng

PY - 2006

Y1 - 2006

N2 - A new microactuator design was fabricated to make a qualitative researcher on the PZT (Pb(Zr,Ti)O3) piezoelectric thin film. A novel V type valve geometry structure enables fluid pumping. The PZT thin films were used to fabricate multi-layer driving membrane for microactuator by its piezoelectric response. As the key technology of driving membrane, the Si /SiO2/Ti /Au /PZT/Cr/Au multi-layer film preparation on silicon substrate was developed. The microactuator consists of silicon-silicon stack and is fabricated with anisotropic etching process involving pump chamber and V type valve etching step. The SEM (scanning electron microscope) photographs of V type valve and XRD (X-ray diffraction) analysis for the multi-layer driving membrane were presented. The results show that the method of pump chamber fabricated is flat and uniform and the problem of PZT deposited on silicon substrate solved well. The single layer design of V type valve reduced the fabrication complexity and it satisfied the desires for materials retrenchment. Design and fabricated are described and discussed in this paper.

AB - A new microactuator design was fabricated to make a qualitative researcher on the PZT (Pb(Zr,Ti)O3) piezoelectric thin film. A novel V type valve geometry structure enables fluid pumping. The PZT thin films were used to fabricate multi-layer driving membrane for microactuator by its piezoelectric response. As the key technology of driving membrane, the Si /SiO2/Ti /Au /PZT/Cr/Au multi-layer film preparation on silicon substrate was developed. The microactuator consists of silicon-silicon stack and is fabricated with anisotropic etching process involving pump chamber and V type valve etching step. The SEM (scanning electron microscope) photographs of V type valve and XRD (X-ray diffraction) analysis for the multi-layer driving membrane were presented. The results show that the method of pump chamber fabricated is flat and uniform and the problem of PZT deposited on silicon substrate solved well. The single layer design of V type valve reduced the fabrication complexity and it satisfied the desires for materials retrenchment. Design and fabricated are described and discussed in this paper.

KW - Microactuator

KW - PZT

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KW - V type valve

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DO - 10.1109/NEMS.2006.334913

M3 - Conference contribution

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SN - 1424401402

SN - 9781424401406

T3 - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

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BT - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

T2 - 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Y2 - 18 January 2006 through 21 January 2006

ER -

Qiu C, Zhang H, Qu W, Liu H, Bu D, Cao M. A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 864-867. 4135086. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). doi: 10.1109/NEMS.2006.334913

A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel

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