Abstract
Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.
| Original language | English |
|---|---|
| Article number | 9232 |
| Pages (from-to) | 239-245 |
| Number of pages | 7 |
| Journal | Sensors and Actuators A: Physical |
| Volume | 233 |
| DOIs | |
| Publication status | Published - 3 Aug 2015 |
| Externally published | Yes |
Keywords
- Distal fiber scanning
- Electrothermal actuation
- Fiber scanner
- Large range
- MEMS stage
- Micro-platform
- Microactuator