A new method used for measuring the parameter of elastic thin-neck based on CCD aiming

Jiwen Cui*, Lirong Qiu, Guoliang Jin, Jiubin Tan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

A new method used in measuring the parameter of elastic thin-neck is presented because of the shortage in measuring these parameter on old methods. The method utilizes high precision CCD to aim, high precision raster to measure, rotate the work-platform to acquire the parameter of the elastic thin-neck. The technology of using CCD to aim is applied in the method, and the method is belonged to non-contacted method, as a result to avoid the micro-distortion formed by the micro measuring force. The method can take full advantage of information received by CCD, and have high precision. The experimental result shows that the uncertainty of this method can be up to 0.3μm.

Original languageEnglish
Title of host publicationProceedings of the Second International Symposium on Instrumentation Science and Technology
EditorsT. Jiubin, W. Xianfang, T. Jiubin, W. Xianfang
Pages2/799-2/803
Publication statusPublished - 2002
Externally publishedYes
EventProceedings of the second International Symposium on Instrumentation Science and Technology - Jinan, China
Duration: 18 Aug 200222 Aug 2002

Publication series

NameProceedings of the Second International Symposium on Instrumentation Science and Technology
Volume2

Conference

ConferenceProceedings of the second International Symposium on Instrumentation Science and Technology
Country/TerritoryChina
CityJinan
Period18/08/0222/08/02

Keywords

  • Auto-focus
  • Elastic thin-neck
  • Encoder
  • Location in subpixel

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