A multi-channel test system for calibration of MEMS barometric pressure sensors

Wenzhong Lou; Ding Xuran; Rongsen Hong

doi:10.1109/NEMS.2013.6559782

A multi-channel test system for calibration of MEMS barometric pressure sensors

Wenzhong Lou^*, Ding Xuran, Rongsen Hong

^*Corresponding author for this work

School of Mechatronical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.

Original language	English
Title of host publication	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages	516-519
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2013.6559782
Publication status	Published - 2013
Event	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China Duration: 7 Apr 2013 → 10 Apr 2013

Publication series

Name	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Conference

Conference	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Country/Territory	China
City	Suzhou
Period	7/04/13 → 10/04/13

Keywords

Radiosondes
calibration of MEMS sensors
multi-channel
test system

Access to Document

10.1109/NEMS.2013.6559782

Cite this

Lou, W., Xuran, D., & Hong, R. (2013). A multi-channel test system for calibration of MEMS barometric pressure sensors. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 516-519). Article 6559782 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559782

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title = "A multi-channel test system for calibration of MEMS barometric pressure sensors",

abstract = "For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.",

keywords = "Radiosondes, calibration of MEMS sensors, multi-channel, test system",

author = "Wenzhong Lou and Ding Xuran and Rongsen Hong",

year = "2013",

doi = "10.1109/NEMS.2013.6559782",

language = "English",

isbn = "9781467363525",

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pages = "516--519",

booktitle = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",

note = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 ; Conference date: 07-04-2013 Through 10-04-2013",

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Lou, W, Xuran, D & Hong, R 2013, A multi-channel test system for calibration of MEMS barometric pressure sensors. in 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013., 6559782, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, pp. 516-519, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, Suzhou, China, 7/04/13. https://doi.org/10.1109/NEMS.2013.6559782

A multi-channel test system for calibration of MEMS barometric pressure sensors. / Lou, Wenzhong; Xuran, Ding; Hong, Rongsen.
8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 516-519 6559782 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Lou, Wenzhong

AU - Xuran, Ding

AU - Hong, Rongsen

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N2 - For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.

AB - For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.

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KW - calibration of MEMS sensors

KW - multi-channel

KW - test system

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Lou W, Xuran D, Hong R. A multi-channel test system for calibration of MEMS barometric pressure sensors. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 516-519. 6559782. (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). doi: 10.1109/NEMS.2013.6559782

A multi-channel test system for calibration of MEMS barometric pressure sensors

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Keywords

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