TY - JOUR
T1 - A Monolithic Forward-View MEMS Laser Scanner with Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications
AU - Wang, Dingkang
AU - Koppal, Sanjeev J.
AU - Xie, Huikai
N1 - Publisher Copyright:
© 1992-2012 IEEE.
PY - 2020/10
Y1 - 2020/10
N2 - This paper reports the design, fabrication, and characterization of a forward-view optical scanner realized by two vertical 2-axis MEMS mirrors integrated on a Silicon Optical Bench (SiOB). The mirror plate sizes of the first and second MEMS mirrors are 0.6× 0.7 mm2 and 1.2× 1.4 mm2, respectively. With the second MEMS mirror larger, the optical beam will not be truncated even during large-angle dynamic scanning. This dual-mirror configuration also enables multiple scanning modes, e.g., an enlarged 2D field of view (FoV) by combining the scans of both mirrors, and a decoupled raster scanning by actuating the two mirrors separately. Experiments show that the enlarged 2D FoV reached 28°(h) × 31° (v) and the FoV of the decoupled raster scanning reached 38°(h) × 8° (v). The measured first resonances of the two mirrors were 2.09 kHz and 0.85 kHz, respectively. The overall size of the MEMS scanner was only 5.3× 5.8× 3.0 mm3, and its weight was 20 mg. This 2-axis forward optical scanner is much smaller and lighter than other two-mirror scanning modules, giving it a great potential for applications in miniature LiDAR for micro-robotics. [2020-0081].
AB - This paper reports the design, fabrication, and characterization of a forward-view optical scanner realized by two vertical 2-axis MEMS mirrors integrated on a Silicon Optical Bench (SiOB). The mirror plate sizes of the first and second MEMS mirrors are 0.6× 0.7 mm2 and 1.2× 1.4 mm2, respectively. With the second MEMS mirror larger, the optical beam will not be truncated even during large-angle dynamic scanning. This dual-mirror configuration also enables multiple scanning modes, e.g., an enlarged 2D field of view (FoV) by combining the scans of both mirrors, and a decoupled raster scanning by actuating the two mirrors separately. Experiments show that the enlarged 2D FoV reached 28°(h) × 31° (v) and the FoV of the decoupled raster scanning reached 38°(h) × 8° (v). The measured first resonances of the two mirrors were 2.09 kHz and 0.85 kHz, respectively. The overall size of the MEMS scanner was only 5.3× 5.8× 3.0 mm3, and its weight was 20 mg. This 2-axis forward optical scanner is much smaller and lighter than other two-mirror scanning modules, giving it a great potential for applications in miniature LiDAR for micro-robotics. [2020-0081].
KW - LiDAR
KW - MEMS LiDAR
KW - MEMS mirror
KW - electrothermal actuation
KW - forward-view scanner
KW - vertical MEMS mirror
UR - http://www.scopus.com/inward/record.url?scp=85087510465&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2020.3001921
DO - 10.1109/JMEMS.2020.3001921
M3 - Article
AN - SCOPUS:85087510465
SN - 1057-7157
VL - 29
SP - 996
EP - 1001
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 5
M1 - 9123864
ER -