A model study of the surface discharge induced plasma chemical process

Here we present an equivalent circuit model for the study of the surface discharge induced plasma chemical process (SPCP). The simplified model consists of a series of gaseous and ceramic capacitors. The discharge characteristics of the SPCP device are investigated based on this model. The discharge current, the average length of the streamer filaments, the inception breakdown voltage, the density of the surface charges, the dynamic capacity and the effective energy associated with the discharge process are simulated. The computed results are in good agreement with the experimental data.