@inproceedings{551224535f4e4898a01e11b0ac4cf175,
title = "A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage",
abstract = "This paper reports the design and characterization of a MEMS lens scanner based on a novel electrothermally-Actuated MEMS stage and a planoconvex polymer lens. Cu and W are used in the electrothermal bimorph actuators, replacing previously employed Al and SiO2 to improve the stiffness of the MEMS stage. At the same time, the lens is made of PDMS, greatly reducing the weight compared to glass lenses. The MEMS lens scanner can generate a large vertical movement of over 100μm at only 5 V, while still keeping its piston resonant frequency as high as 293 Hz. The footprint of this MEMS lens scanner is only 3.8× 3.8 mm2.",
keywords = "Cu/W bimorph, MEMS stage, electrothermal actuation, lens scanner, polymer lens",
author = "Liang Zhou and Xiaoyang Zhang and Yulung Sung and Shih, {Wei Chuan} and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 ; Conference date: 29-07-2018 Through 02-08-2018",
year = "2018",
month = sep,
day = "4",
doi = "10.1109/OMN.2018.8454613",
language = "English",
isbn = "9781509063727",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings",
address = "United States",
}