A miniature fourier transform spectrometer by a large-vertical-displacement microelectromechanical mirror

Lei Wu, Andrea Pais, Sean R. Samuelson, Shuguang Guo, Huikai Xie

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Abstract

A microelectromechanichal system (MEMS) mirror based miniature Fourier transform spectrometer is reported. A spectral resolution of 19.2 cm-1 has been achieved with a 261 μm physical scan range generated by the large-vertical-displacement MEMS mirror.

Original languageEnglish
Title of host publicationFourier Transform Spectroscopy, FTS 2009
PublisherOptical Society of America (OSA)
ISBN (Print)9781557528711
DOIs
Publication statusPublished - 2009
Externally publishedYes
EventFourier Transform Spectroscopy, FTS 2009 - Vancouver, Canada
Duration: 26 Apr 2009 → 30 Apr 2009

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceFourier Transform Spectroscopy, FTS 2009
Country/TerritoryCanada
CityVancouver
Period26/04/09 → 30/04/09

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Wu, L., Pais, A., Samuelson, S. R., Guo, S., & Xie, H. (2009). A miniature fourier transform spectrometer by a large-vertical-displacement microelectromechanical mirror. In Fourier Transform Spectroscopy, FTS 2009 (Optics InfoBase Conference Papers). Optical Society of America (OSA). https://doi.org/10.1364/fts.2009.fwd4