@inproceedings{e59488e0b8f2499e9e8d4936e307c0f2,
title = "A miniature Fourier transform spectrometer based on an electrothermal MEMS mirror with asynchronous calibration",
abstract = "In a MEMS mirror-based dual interference Fourier transform spectrometer (FTS) with a laser interferometer as the position sensing mechanism, making the two interferometers coaxial is very challenging. To solve this problem, a single interference MEMS FTS based on asynchronous calibration is designed. This single interference FTS uses a dichroic mirror to couple a laser beam and a broadband light beam into the same interferometer. Since the two optical beams share the same optical path, they will experience the same change when the position of any optical component along the optical path is adjusted. In data acquisition, the two interference signals are acquired asynchronously by the same InGaAs photodetector. This asynchronous calibration can effectively eliminate the laser coupling issue. According to the experimental results, compared with the dual interference spectrometer, the proposed spectrometer based on asynchronous calibration can improve the spectral repeatability and make the system simpler and lower power consumption.",
keywords = "Asynchronous calibration, Fourier transform spectrometer, MEMS",
author = "Ruifan Zhao and Qiangqiang Liu and Chao Chen and Jiqiang Cao and Yuan Xue and Donglin Wang and Qian Chen and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2023 SPIE. All rights reserved.; 2023 Applied Optics and Photonics China: Optical Spectroscopy and Imaging; and Atmospheric and Environmental Optics, AOPC 2023 ; Conference date: 25-07-2023 Through 27-07-2023",
year = "2023",
doi = "10.1117/12.3008011",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Yutao Feng and Zongyin Yang and Dong Liu",
booktitle = "AOPC 2023",
address = "United States",
}