@inproceedings{7a381f16d54e44b4b236dd6af0cb0292,
title = "A MEMS capacitive gyroscope with improved reliability",
abstract = "The MEMS capacitive gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of the MEMS gyroscope were presented. In addition, the adhesion failure analysis was illustrated. Finally, a lateral comb structure to improve the reliability of the MEMS gyroscope was presented. Test result indicates that the reliability of the MEMS capacitive gyroscope is improved.",
keywords = "Adhesion failure, Lateral comb capacitor, MEMS gyroscope, Reliability",
author = "Liang, {X. J.} and Gao, {S. Q.}",
year = "2009",
doi = "10.4028/www.scientific.net/MSF.628-629.341",
language = "English",
isbn = "0878493123",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd.",
pages = "341--346",
booktitle = "Advances in Materials Manufacturing Science and Technology XIII",
address = "Switzerland",
note = "13th International Manufacturing Conference in China, IMCC2009 ; Conference date: 21-09-2009 Through 23-09-2009",
}