A MEMS-based monolithic electrostatic microactuator for ultra-low magnetic disk head fly height control

Fang Chen; Huikai Xie; Gary K. Fedder

doi:10.1109/20.951007

A MEMS-based monolithic electrostatic microactuator for ultra-low magnetic disk head fly height control

Fang Chen^*, Huikai Xie, Gary K. Fedder

^*Corresponding author for this work

Carnegie Mellon University

Research output: Contribution to journal › Conference article › peer-review

7 Citations (Scopus)

Abstract

A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a slider with a modified CMOS-MEMS process. It has an extremely small size, light weight and a very simple structure. The head is suspended and actuated up and down by the actuator during recording process to maintain a constant fly height. A desired range and precision of actuation is achieved under control voltages of less than 30 V. A mechanical resonant frequency of over 100 kHz is obtained.

Original language	English
Pages (from-to)	1915-1918
Number of pages	4
Journal	IEEE Transactions on Magnetics
Volume	37
Issue number	4 I
DOIs	https://doi.org/10.1109/20.951007
Publication status	Published - Jul 2001
Externally published	Yes
Event	8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States Duration: 7 Jan 2001 → 11 Jan 2001

Keywords

Fly height
MEMS electrostatic actuator
Micro-fabrication
Slider

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10.1109/20.951007

Cite this

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title = "A MEMS-based monolithic electrostatic microactuator for ultra-low magnetic disk head fly height control",

abstract = "A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a slider with a modified CMOS-MEMS process. It has an extremely small size, light weight and a very simple structure. The head is suspended and actuated up and down by the actuator during recording process to maintain a constant fly height. A desired range and precision of actuation is achieved under control voltages of less than 30 V. A mechanical resonant frequency of over 100 kHz is obtained.",

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author = "Fang Chen and Huikai Xie and Fedder, {Gary K.}",

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AU - Chen, Fang

AU - Xie, Huikai

AU - Fedder, Gary K.

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N2 - A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a slider with a modified CMOS-MEMS process. It has an extremely small size, light weight and a very simple structure. The head is suspended and actuated up and down by the actuator during recording process to maintain a constant fly height. A desired range and precision of actuation is achieved under control voltages of less than 30 V. A mechanical resonant frequency of over 100 kHz is obtained.

AB - A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a slider with a modified CMOS-MEMS process. It has an extremely small size, light weight and a very simple structure. The head is suspended and actuated up and down by the actuator during recording process to maintain a constant fly height. A desired range and precision of actuation is achieved under control voltages of less than 30 V. A mechanical resonant frequency of over 100 kHz is obtained.

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KW - MEMS electrostatic actuator

KW - Micro-fabrication

KW - Slider

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A MEMS-based monolithic electrostatic microactuator for ultra-low magnetic disk head fly height control

Abstract

Keywords

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