A low-power low-noise dual-chopper amplifier for capacitive CMOS-MEMS accelerometers

Hongzhi Sun; Deyou Fang; Kemiao Jia; Fares Maarouf; Hongwei Qu; Huikai Xie

doi:10.1109/JSEN.2010.2064296

A low-power low-noise dual-chopper amplifier for capacitive CMOS-MEMS accelerometers

Hongzhi Sun^*, Deyou Fang, Kemiao Jia, Fares Maarouf, Hongwei Qu, Huikai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

70 Citations (Scopus)

Abstract

This paper reports a novel dual-chopper amplifier (DCA) and its application to monolithic complementary metaloxide semiconductor-microelectromechanical systems accelerometers. The DCA design minimizes the power consumption and noise by chopping the sensing signals at two clocks. The first clock is a high frequency for removing the flicker noise while the second clock is a significantly lower frequency to keep the unit gain bandwidth low. A monolithic three-axis accelerometer integrated with the DCA on the same chip has been successfully fabricated using a post-CMOS micromachining process. The measured noise floors are 40 μg/√Hz in the x- and y-axis and 130 μg/√Hz in the z-axis, and the power consumption is about 1 mW per axis.

Original language	English
Article number	5582186
Pages (from-to)	925-933
Number of pages	9
Journal	IEEE Sensors Journal
Volume	11
Issue number	4
DOIs	https://doi.org/10.1109/JSEN.2010.2064296
Publication status	Published - 2011
Externally published	Yes

Keywords

Accelerometer
capacitive sensing
chopper stabilization
complementary metal-oxide semiconductor-microelectromechanical systems (CMOS-MEMS)
dual-chopper amplifier (DCA)
microelectromechanical systems (MEMS)
monolithic integration

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10.1109/JSEN.2010.2064296

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title = "A low-power low-noise dual-chopper amplifier for capacitive CMOS-MEMS accelerometers",

abstract = "This paper reports a novel dual-chopper amplifier (DCA) and its application to monolithic complementary metaloxide semiconductor-microelectromechanical systems accelerometers. The DCA design minimizes the power consumption and noise by chopping the sensing signals at two clocks. The first clock is a high frequency for removing the flicker noise while the second clock is a significantly lower frequency to keep the unit gain bandwidth low. A monolithic three-axis accelerometer integrated with the DCA on the same chip has been successfully fabricated using a post-CMOS micromachining process. The measured noise floors are 40 μg/√Hz in the x- and y-axis and 130 μg/√Hz in the z-axis, and the power consumption is about 1 mW per axis.",

keywords = "Accelerometer, capacitive sensing, chopper stabilization, complementary metal-oxide semiconductor-microelectromechanical systems (CMOS-MEMS), dual-chopper amplifier (DCA), microelectromechanical systems (MEMS), monolithic integration",

author = "Hongzhi Sun and Deyou Fang and Kemiao Jia and Fares Maarouf and Hongwei Qu and Huikai Xie",

year = "2011",

doi = "10.1109/JSEN.2010.2064296",

language = "English",

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AU - Sun, Hongzhi

AU - Fang, Deyou

AU - Jia, Kemiao

AU - Maarouf, Fares

AU - Qu, Hongwei

AU - Xie, Huikai

PY - 2011

Y1 - 2011

N2 - This paper reports a novel dual-chopper amplifier (DCA) and its application to monolithic complementary metaloxide semiconductor-microelectromechanical systems accelerometers. The DCA design minimizes the power consumption and noise by chopping the sensing signals at two clocks. The first clock is a high frequency for removing the flicker noise while the second clock is a significantly lower frequency to keep the unit gain bandwidth low. A monolithic three-axis accelerometer integrated with the DCA on the same chip has been successfully fabricated using a post-CMOS micromachining process. The measured noise floors are 40 μg/√Hz in the x- and y-axis and 130 μg/√Hz in the z-axis, and the power consumption is about 1 mW per axis.

AB - This paper reports a novel dual-chopper amplifier (DCA) and its application to monolithic complementary metaloxide semiconductor-microelectromechanical systems accelerometers. The DCA design minimizes the power consumption and noise by chopping the sensing signals at two clocks. The first clock is a high frequency for removing the flicker noise while the second clock is a significantly lower frequency to keep the unit gain bandwidth low. A monolithic three-axis accelerometer integrated with the DCA on the same chip has been successfully fabricated using a post-CMOS micromachining process. The measured noise floors are 40 μg/√Hz in the x- and y-axis and 130 μg/√Hz in the z-axis, and the power consumption is about 1 mW per axis.

KW - Accelerometer

KW - capacitive sensing

KW - chopper stabilization

KW - complementary metal-oxide semiconductor-microelectromechanical systems (CMOS-MEMS)

KW - dual-chopper amplifier (DCA)

KW - microelectromechanical systems (MEMS)

KW - monolithic integration

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ER -

A low-power low-noise dual-chopper amplifier for capacitive CMOS-MEMS accelerometers

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Keywords

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