A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens

L. Wu; H. Xie

doi:10.1109/SENSOR.2007.4300320

A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens

L. Wu^*, H. Xie

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

15 Citations (Scopus)

Abstract

This paper reports the design, fabrication and characterization of a novel lateral-shift-free (LSF) large-vertical-displacement (LVD) electrothermal actuator. Both micromirror and microlens holder based on the actuator design have been fabricated by a combined surface- and bulk-micromachining process. A 0.62mm vertical displacement has been demonstrated at only 5.3Vdc for a fabricated 0.8mm by 0.8mm micromirror, and both the lateral shift (10μm) and tilting angle (0.7°) are negligible in the full displacement range. The measured resonant frequency of the vertical motion resonance mode is 453Hz.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1075-1078
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300320
Publication status	Published - 2007
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

Confocal imaging
Electrothermal bimorph actuator
Large vertical displacement (LVD)
Lateral shift free (LSF)
Microlens
Micromirror

Access to Document

10.1109/SENSOR.2007.4300320

Cite this

Wu, L., & Xie, H. (2007). A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1075-1078). Article 4300320 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300320

Wu, L. ; Xie, H. / A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 1075-1078 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

@inproceedings{be87f3140214485a8ccc3d832e45c669,

title = "A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens",

abstract = "This paper reports the design, fabrication and characterization of a novel lateral-shift-free (LSF) large-vertical-displacement (LVD) electrothermal actuator. Both micromirror and microlens holder based on the actuator design have been fabricated by a combined surface- and bulk-micromachining process. A 0.62mm vertical displacement has been demonstrated at only 5.3Vdc for a fabricated 0.8mm by 0.8mm micromirror, and both the lateral shift (10μm) and tilting angle (0.7°) are negligible in the full displacement range. The measured resonant frequency of the vertical motion resonance mode is 453Hz.",

keywords = "Confocal imaging, Electrothermal bimorph actuator, Large vertical displacement (LVD), Lateral shift free (LSF), Microlens, Micromirror",

author = "L. Wu and H. Xie",

year = "2007",

doi = "10.1109/SENSOR.2007.4300320",

language = "English",

isbn = "1424408423",

series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

pages = "1075--1078",

booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",

}

Wu, L & Xie, H 2007, A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300320, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1075-1078, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300320

A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens. / Wu, L.; Xie, H.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1075-1078 4300320 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens

AU - Wu, L.

AU - Xie, H.

PY - 2007

Y1 - 2007

N2 - This paper reports the design, fabrication and characterization of a novel lateral-shift-free (LSF) large-vertical-displacement (LVD) electrothermal actuator. Both micromirror and microlens holder based on the actuator design have been fabricated by a combined surface- and bulk-micromachining process. A 0.62mm vertical displacement has been demonstrated at only 5.3Vdc for a fabricated 0.8mm by 0.8mm micromirror, and both the lateral shift (10μm) and tilting angle (0.7°) are negligible in the full displacement range. The measured resonant frequency of the vertical motion resonance mode is 453Hz.

AB - This paper reports the design, fabrication and characterization of a novel lateral-shift-free (LSF) large-vertical-displacement (LVD) electrothermal actuator. Both micromirror and microlens holder based on the actuator design have been fabricated by a combined surface- and bulk-micromachining process. A 0.62mm vertical displacement has been demonstrated at only 5.3Vdc for a fabricated 0.8mm by 0.8mm micromirror, and both the lateral shift (10μm) and tilting angle (0.7°) are negligible in the full displacement range. The measured resonant frequency of the vertical motion resonance mode is 453Hz.

KW - Confocal imaging

KW - Electrothermal bimorph actuator

KW - Large vertical displacement (LVD)

KW - Lateral shift free (LSF)

KW - Microlens

KW - Micromirror

UR - http://www.scopus.com/inward/record.url?scp=50049117213&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2007.4300320

DO - 10.1109/SENSOR.2007.4300320

M3 - Conference contribution

AN - SCOPUS:50049117213

SN - 1424408423

SN - 9781424408429

T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 1075

EP - 1078

BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07

Y2 - 10 June 2007 through 14 June 2007

ER -

Wu L, Xie H. A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1075-1078. 4300320. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2007.4300320

A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens

Abstract

Publication series

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Keywords

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