A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving

Z. Y. Guo; Z. C. Yang; Q. C. Zhao; L. T. Lin; H. T. Ding; X. S. Liu; J. Cui; H. Xie; G. Z. Yan

doi:10.1088/0960-1317/20/2/025007

A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving

Z. Y. Guo, Z. C. Yang, Q. C. Zhao, L. T. Lin, H. T. Ding, X. S. Liu, J. Cui, H. Xie, G. Z. Yan

Research output: Contribution to journal › Article › peer-review

23 Citations (Scopus)

Abstract

A single-crystal silicon-based lateral-axis tuning-fork gyroscope (TFG) with electrostatic force-balanced (EFB) driving and torsional z-sensing is presented. The EFB comb drive used in this TFG can efficiently suppress the mechanical coupling in a simple manner. The TFG structure is also optimized to further reduce the coupling. Moreover, the Coriolis acceleration-induced out-of-plane rotation of the sensing mode is detected by using bending springs and differential comb fingers. This z-sensing design has relatively high Q, so this gyroscope can work at atmospheric pressure. This TFG design has been fabricated and tested. Measured in air, the device demonstrates a sensitivity of 2.9 mV/°/s, a full range of 800° s^-1 with a 0.9% nonlinearity and the noise floor of 0.035°/s/Hz^1/2. This TFG design also has very low coupling, where the measured drive-to-sense coupling and sense-to-drive coupling are -45 dB and -51 dB, respectively.

Original language	English
Article number	025007
Journal	Journal of Micromechanics and Microengineering
Volume	20
Issue number	2
DOIs	https://doi.org/10.1088/0960-1317/20/2/025007
Publication status	Published - 2010
Externally published	Yes

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@article{643351b506774d8bbb9162d6311dc381,

title = "A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving",

abstract = "A single-crystal silicon-based lateral-axis tuning-fork gyroscope (TFG) with electrostatic force-balanced (EFB) driving and torsional z-sensing is presented. The EFB comb drive used in this TFG can efficiently suppress the mechanical coupling in a simple manner. The TFG structure is also optimized to further reduce the coupling. Moreover, the Coriolis acceleration-induced out-of-plane rotation of the sensing mode is detected by using bending springs and differential comb fingers. This z-sensing design has relatively high Q, so this gyroscope can work at atmospheric pressure. This TFG design has been fabricated and tested. Measured in air, the device demonstrates a sensitivity of 2.9 mV/°/s, a full range of 800° s-1 with a 0.9% nonlinearity and the noise floor of 0.035°/s/Hz1/2. This TFG design also has very low coupling, where the measured drive-to-sense coupling and sense-to-drive coupling are -45 dB and -51 dB, respectively.",

author = "Guo, {Z. Y.} and Yang, {Z. C.} and Zhao, {Q. C.} and Lin, {L. T.} and Ding, {H. T.} and Liu, {X. S.} and J. Cui and H. Xie and Yan, {G. Z.}",

year = "2010",

doi = "10.1088/0960-1317/20/2/025007",

language = "English",

volume = "20",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

number = "2",

}

TY - JOUR

T1 - A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving

AU - Guo, Z. Y.

AU - Yang, Z. C.

AU - Zhao, Q. C.

AU - Lin, L. T.

AU - Ding, H. T.

AU - Liu, X. S.

AU - Cui, J.

AU - Xie, H.

AU - Yan, G. Z.

PY - 2010

Y1 - 2010

N2 - A single-crystal silicon-based lateral-axis tuning-fork gyroscope (TFG) with electrostatic force-balanced (EFB) driving and torsional z-sensing is presented. The EFB comb drive used in this TFG can efficiently suppress the mechanical coupling in a simple manner. The TFG structure is also optimized to further reduce the coupling. Moreover, the Coriolis acceleration-induced out-of-plane rotation of the sensing mode is detected by using bending springs and differential comb fingers. This z-sensing design has relatively high Q, so this gyroscope can work at atmospheric pressure. This TFG design has been fabricated and tested. Measured in air, the device demonstrates a sensitivity of 2.9 mV/°/s, a full range of 800° s-1 with a 0.9% nonlinearity and the noise floor of 0.035°/s/Hz1/2. This TFG design also has very low coupling, where the measured drive-to-sense coupling and sense-to-drive coupling are -45 dB and -51 dB, respectively.

AB - A single-crystal silicon-based lateral-axis tuning-fork gyroscope (TFG) with electrostatic force-balanced (EFB) driving and torsional z-sensing is presented. The EFB comb drive used in this TFG can efficiently suppress the mechanical coupling in a simple manner. The TFG structure is also optimized to further reduce the coupling. Moreover, the Coriolis acceleration-induced out-of-plane rotation of the sensing mode is detected by using bending springs and differential comb fingers. This z-sensing design has relatively high Q, so this gyroscope can work at atmospheric pressure. This TFG design has been fabricated and tested. Measured in air, the device demonstrates a sensitivity of 2.9 mV/°/s, a full range of 800° s-1 with a 0.9% nonlinearity and the noise floor of 0.035°/s/Hz1/2. This TFG design also has very low coupling, where the measured drive-to-sense coupling and sense-to-drive coupling are -45 dB and -51 dB, respectively.

UR - http://www.scopus.com/inward/record.url?scp=75649149461&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/20/2/025007

DO - 10.1088/0960-1317/20/2/025007

M3 - Article

AN - SCOPUS:75649149461

SN - 0960-1317

VL - 20

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 2

M1 - 025007

ER -

A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving

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