A large piston displacement MEMS mirror with electrothermal ladder actuator arrays for ultra-low tilt applications

Sean R. Samuelson; Huikai Xie

doi:10.1109/JMEMS.2013.2290994

A large piston displacement MEMS mirror with electrothermal ladder actuator arrays for ultra-low tilt applications

Sean R. Samuelson, Huikai Xie

University of Florida

Research output: Contribution to journal › Article › peer-review

46 Citations (Scopus)

Abstract

A large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9 mm ×,1.9 mm with a mirror aperture of 1 mm. The application optimized device holds key features of ultralow maximum tilt of 0.25° and a strongly linear motion of 90 μm achievable at only 1.2 V. This device is further characterized in an interferometric system to determine the piston mode and the accurate piston displacement as a function of voltage, power, and frequency.

Original language	English
Article number	6676786
Pages (from-to)	39-49
Number of pages	11
Journal	Journal of Microelectromechanical Systems
Volume	23
Issue number	1
DOIs	https://doi.org/10.1109/JMEMS.2013.2290994
Publication status	Published - Feb 2014
Externally published	Yes

Keywords

Bimorph
microelectromechanical systems (MEMS)
piston
vertical displacement

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10.1109/JMEMS.2013.2290994

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abstract = "A large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9 mm ×,1.9 mm with a mirror aperture of 1 mm. The application optimized device holds key features of ultralow maximum tilt of 0.25° and a strongly linear motion of 90 μm achievable at only 1.2 V. This device is further characterized in an interferometric system to determine the piston mode and the accurate piston displacement as a function of voltage, power, and frequency.",

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AB - A large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9 mm ×,1.9 mm with a mirror aperture of 1 mm. The application optimized device holds key features of ultralow maximum tilt of 0.25° and a strongly linear motion of 90 μm achievable at only 1.2 V. This device is further characterized in an interferometric system to determine the piston mode and the accurate piston displacement as a function of voltage, power, and frequency.

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KW - vertical displacement

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A large piston displacement MEMS mirror with electrothermal ladder actuator arrays for ultra-low tilt applications

Abstract

Keywords

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