Abstract
This paper reports the design, fabrication and characterization of a 4x4 micromirror array consisting of piston-tip-tilt electrothermal MEMS mirrors. Each mirror has an optical aperture size of 0.5x0.5 mm2. Both tip and tilt angles of over ±30° are obtained at less than 5 Vdc, and the piston displacement reaches 215 μm at 4 Vdc. Two-dimensional scanning was demonstrated. Thermal analysis and transient response were also reported.
Original language | English |
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Title of host publication | MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems |
Pages | 754-757 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2008 |
Externally published | Yes |
Event | 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 13 Jan 2008 → 17 Jan 2008 |
Publication series
Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
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ISSN (Print) | 1084-6999 |
Conference
Conference | 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson |
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Country/Territory | United States |
City | Tucson, AZ |
Period | 13/01/08 → 17/01/08 |
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Wu, L., Maley, S. B., Dooley, S. R., Nelson, T. R., McManamon, P. F., & Xie, H. (2008). A large-aperture, piston-tip-tilt micromirror for optical phase array applications. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 754-757). Article 4443766 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443766