A large-aperture, piston-tip-tilt micromirror for optical phase array applications

L. Wu; S. B. Maley; S. R. Dooley; T. R. Nelson; P. F. McManamon; H. Xie

doi:10.1109/MEMSYS.2008.4443766

A large-aperture, piston-tip-tilt micromirror for optical phase array applications

L. Wu^*, S. B. Maley, S. R. Dooley, T. R. Nelson, P. F. McManamon, H. Xie

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

23 Citations (Scopus)

Abstract

This paper reports the design, fabrication and characterization of a 4x4 micromirror array consisting of piston-tip-tilt electrothermal MEMS mirrors. Each mirror has an optical aperture size of 0.5x0.5 mm². Both tip and tilt angles of over ±30° are obtained at less than 5 Vdc, and the piston displacement reaches 215 μm at 4 Vdc. Two-dimensional scanning was demonstrated. Thermal analysis and transient response were also reported.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	754-757
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443766
Publication status	Published - 2008
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 13 Jan 2008 → 17 Jan 2008

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	13/01/08 → 17/01/08

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10.1109/MEMSYS.2008.4443766

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Wu, L., Maley, S. B., Dooley, S. R., Nelson, T. R., McManamon, P. F., & Xie, H. (2008). A large-aperture, piston-tip-tilt micromirror for optical phase array applications. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 754-757). Article 4443766 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443766

@inproceedings{a8627d09223e4fdf80e1c391a4694a12,

title = "A large-aperture, piston-tip-tilt micromirror for optical phase array applications",

abstract = "This paper reports the design, fabrication and characterization of a 4x4 micromirror array consisting of piston-tip-tilt electrothermal MEMS mirrors. Each mirror has an optical aperture size of 0.5x0.5 mm2. Both tip and tilt angles of over ±30° are obtained at less than 5 Vdc, and the piston displacement reaches 215 μm at 4 Vdc. Two-dimensional scanning was demonstrated. Thermal analysis and transient response were also reported.",

author = "L. Wu and Maley, {S. B.} and Dooley, {S. R.} and Nelson, {T. R.} and McManamon, {P. F.} and H. Xie",

year = "2008",

doi = "10.1109/MEMSYS.2008.4443766",

language = "English",

isbn = "9781424417933",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "754--757",

booktitle = "MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems",

note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",

}

Wu, L, Maley, SB, Dooley, SR, Nelson, TR, McManamon, PF & Xie, H 2008, A large-aperture, piston-tip-tilt micromirror for optical phase array applications. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443766, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 754-757, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 13/01/08. https://doi.org/10.1109/MEMSYS.2008.4443766

A large-aperture, piston-tip-tilt micromirror for optical phase array applications. / Wu, L.; Maley, S. B.; Dooley, S. R. et al.
MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 754-757 4443766 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Maley, S. B.

AU - Dooley, S. R.

AU - Nelson, T. R.

AU - McManamon, P. F.

AU - Xie, H.

PY - 2008

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AB - This paper reports the design, fabrication and characterization of a 4x4 micromirror array consisting of piston-tip-tilt electrothermal MEMS mirrors. Each mirror has an optical aperture size of 0.5x0.5 mm2. Both tip and tilt angles of over ±30° are obtained at less than 5 Vdc, and the piston displacement reaches 215 μm at 4 Vdc. Two-dimensional scanning was demonstrated. Thermal analysis and transient response were also reported.

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DO - 10.1109/MEMSYS.2008.4443766

M3 - Conference contribution

AN - SCOPUS:50149094875

SN - 9781424417933

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 754

EP - 757

BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems

T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson

Y2 - 13 January 2008 through 17 January 2008

ER -

Wu L, Maley SB, Dooley SR, Nelson TR, McManamon PF, Xie H. A large-aperture, piston-tip-tilt micromirror for optical phase array applications. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 754-757. 4443766. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2008.4443766

A large-aperture, piston-tip-tilt micromirror for optical phase array applications

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