TY - GEN
T1 - A high-precision low-power capacitive sensor readout circuit
AU - Li, Yuqi
AU - Han, Fang
AU - Qi, Quanwen
AU - Li, Xiaoran
AU - Liu, Zicheng
AU - Li, Wei
AU - Xu, Minglu
AU - Wang, Xinghua
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - This paper presents a readout circuit for CMOSMEMS accelerometer sensors, including a current-to-voltage lownoise weak signal amplifier, a high-precision second-order singlebit quantization Sigma-Delta modulator and a digital filter. We analyse the main factors affecting the noise of the sample and hold circuit and ADC, and the methods to suppress noise and improve linearity. Meanwhile, we reduce power consumption by reducing the order of the modulator and designing it in discrete time when the accuracy could meet the specifications of the sensor header, and achieve monolithic integration of the accelerometer CMOSMEMS chip. Designedin TSMC 180 nm CMOS process, the proposed readout circuit achieve 16-bit high-precision effectivenumber-of-bits (ENOB) and 0.3 mW power consumption.
AB - This paper presents a readout circuit for CMOSMEMS accelerometer sensors, including a current-to-voltage lownoise weak signal amplifier, a high-precision second-order singlebit quantization Sigma-Delta modulator and a digital filter. We analyse the main factors affecting the noise of the sample and hold circuit and ADC, and the methods to suppress noise and improve linearity. Meanwhile, we reduce power consumption by reducing the order of the modulator and designing it in discrete time when the accuracy could meet the specifications of the sensor header, and achieve monolithic integration of the accelerometer CMOSMEMS chip. Designedin TSMC 180 nm CMOS process, the proposed readout circuit achieve 16-bit high-precision effectivenumber-of-bits (ENOB) and 0.3 mW power consumption.
KW - CMOS-MEMS
KW - Correlated double sampling
KW - Low-power
KW - Sigma-Delta modulator
UR - http://www.scopus.com/inward/record.url?scp=85202447864&partnerID=8YFLogxK
U2 - 10.1109/ECIE61885.2024.10626236
DO - 10.1109/ECIE61885.2024.10626236
M3 - Conference contribution
AN - SCOPUS:85202447864
T3 - 2024 4th International Conference on Electronics, Circuits and Information Engineering, ECIE 2024
SP - 1
EP - 5
BT - 2024 4th International Conference on Electronics, Circuits and Information Engineering, ECIE 2024
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 4th International Conference on Electronics, Circuits and Information Engineering, ECIE 2024
Y2 - 24 May 2024 through 26 May 2024
ER -