A grating interferometer based high-sensitivity acoustic sensor packaged with optoelectronic readout module

Mengying Zhang, Zhenjun Ma, Ran Gao, Zhi Mei Qi*, Xingdong Liang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

An acoustic sensor based on grating interferometer has been developed. The interference structure was made of glass and packaged with the optoelectronic readout module. The acoustic sensor achieved high-sensitivity and high-quality response.

Original languageEnglish
Title of host publicationOptical Sensors, Sensors 2019
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580613
DOIs
Publication statusPublished - 2019
Externally publishedYes
EventOptical Sensors, Sensors 2019 - San Jose, United States
Duration: 25 Jun 201927 Jun 2019

Publication series

NameOptics InfoBase Conference Papers
VolumePart F166-Sensors 2019
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Sensors, Sensors 2019
Country/TerritoryUnited States
CitySan Jose
Period25/06/1927/06/19

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