A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage

Liang Zhou, Zhi Li, Mengyue Liang, Yanping Chen, Xiaoyang Zhang, Huikai Xie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Fiber scanning for forward-view imaging method has been widely used in biomedical imaging. It also attracts great interest in the fields of virtual and augmented reality. In this study, we propose a fiber scanner actuated by a robust Cu/W electrothermal MEMS stage which can be driven quasi-statically. The Cu/W MEMS stage is successfully fabricated after overcoming Cu oxidization. Compared to previous Al/SiO2 MEMS stages, this new Cu/W MEMS stage, which generates 0.7 mN forces at 1.8 V, offers three times more force. The MEMS stage can travel up to 53 μm at only 1.8 V. A single-mode fiber is assembled on the central platform of the MEMS stage to form a fiber scanner. The travel range can be amplified by four times.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XVIII
EditorsWibool Piyawattanametha, Yong-Hwa Park, Hans Zappe
PublisherSPIE
ISBN (Electronic)9781510625044
DOIs
Publication statusPublished - 2019
EventMOEMS and Miniaturized Systems XVIII 2019 - San Francisco, United States
Duration: 2 Feb 20194 Feb 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10931
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceMOEMS and Miniaturized Systems XVIII 2019
Country/TerritoryUnited States
CitySan Francisco
Period2/02/194/02/19

Keywords

  • Cu/W bimorph
  • Electrothermal actuation
  • MEMS stage
  • Scanning fiber

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