@inproceedings{a44120d7d8a947199a35f95d9f38d755,
title = "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage",
abstract = "Fiber scanning for forward-view imaging method has been widely used in biomedical imaging. It also attracts great interest in the fields of virtual and augmented reality. In this study, we propose a fiber scanner actuated by a robust Cu/W electrothermal MEMS stage which can be driven quasi-statically. The Cu/W MEMS stage is successfully fabricated after overcoming Cu oxidization. Compared to previous Al/SiO2 MEMS stages, this new Cu/W MEMS stage, which generates 0.7 mN forces at 1.8 V, offers three times more force. The MEMS stage can travel up to 53 μm at only 1.8 V. A single-mode fiber is assembled on the central platform of the MEMS stage to form a fiber scanner. The travel range can be amplified by four times.",
keywords = "Cu/W bimorph, Electrothermal actuation, MEMS stage, Scanning fiber",
author = "Liang Zhou and Zhi Li and Mengyue Liang and Yanping Chen and Xiaoyang Zhang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; MOEMS and Miniaturized Systems XVIII 2019 ; Conference date: 02-02-2019 Through 04-02-2019",
year = "2019",
doi = "10.1117/12.2507659",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Wibool Piyawattanametha and Yong-Hwa Park and Hans Zappe",
booktitle = "MOEMS and Miniaturized Systems XVIII",
address = "United States",
}