A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning

Haoran Wang; Philip X.L. Feng; Huikai Xie

doi:10.1109/MEMS51782.2021.9375295

A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning

Haoran Wang, Philip X.L. Feng, Huikai Xie

School of Integrated Circuits and Electronics

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

12 Citations (Scopus)

Abstract

One of the challenges for piezoelectric MEMS speakers is their relatively low sound pressure level (SPL) due to the relatively small piezoelectric constants of sol-gel or sputtered lead zirconate titanate (PZT). In this paper, we present a piezoelectric MEMS speaker with improved SPL that is enabled by high-piezoelectric-coefficient ceramic PZT as well as a dual-electrode configuration with phase tuning. A dual-electrode piezoelectric MEMS speaker based on 4 μm thin ceramic PZT has been designed and fabricated with top electrodes consisting of an inner circular-shaped electrode and an outer ring-shaped electrode. The maximum SPL at 9.7 kHz reaches 121 dB with both electrodes activated simultaneously. Measurements have also revealed that 180° is not always the optimal phase delay between the two driving signals to yield the highest SPL. Instead, the output SPL of the MEMS speaker changes significantly with the phase delay and is frequency dependent, peaking at different phase delays for different frequencies. The optimal phase delays in the frequency band from 600 Hz to 10 kHz have been obtained by phase tuning experiments, which shows 2 to 10 dB SPL improvement compared with the single-electrode driving method.

Original language	English
Title of host publication	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	701-704
Number of pages	4
ISBN (Electronic)	9781665419123
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375295
Publication status	Published - 25 Jan 2021
Event	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States Duration: 25 Jan 2021 → 29 Jan 2021

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2021-January
ISSN (Print)	1084-6999

Conference

Conference	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Country/Territory	United States
City	Virtual, Gainesville
Period	25/01/21 → 29/01/21

Keywords

MEMS speaker
ceramic PZT
dual-electrode
phase tuning
piezoelectric
sound pressure level (SPL)

Access to Document

10.1109/MEMS51782.2021.9375295

Cite this

Wang, H., Feng, P. X. L., & Xie, H. (2021). A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 (pp. 701-704). Article 9375295 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51782.2021.9375295

Wang, Haoran ; Feng, Philip X.L. ; Xie, Huikai. / A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning. 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 701-704 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning",

abstract = "One of the challenges for piezoelectric MEMS speakers is their relatively low sound pressure level (SPL) due to the relatively small piezoelectric constants of sol-gel or sputtered lead zirconate titanate (PZT). In this paper, we present a piezoelectric MEMS speaker with improved SPL that is enabled by high-piezoelectric-coefficient ceramic PZT as well as a dual-electrode configuration with phase tuning. A dual-electrode piezoelectric MEMS speaker based on 4 μm thin ceramic PZT has been designed and fabricated with top electrodes consisting of an inner circular-shaped electrode and an outer ring-shaped electrode. The maximum SPL at 9.7 kHz reaches 121 dB with both electrodes activated simultaneously. Measurements have also revealed that 180° is not always the optimal phase delay between the two driving signals to yield the highest SPL. Instead, the output SPL of the MEMS speaker changes significantly with the phase delay and is frequency dependent, peaking at different phase delays for different frequencies. The optimal phase delays in the frequency band from 600 Hz to 10 kHz have been obtained by phase tuning experiments, which shows 2 to 10 dB SPL improvement compared with the single-electrode driving method.",

keywords = "MEMS speaker, ceramic PZT, dual-electrode, phase tuning, piezoelectric, sound pressure level (SPL)",

author = "Haoran Wang and Feng, {Philip X.L.} and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",

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Wang, H, Feng, PXL & Xie, H 2021, A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning. in 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021., 9375295, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2021-January, Institute of Electrical and Electronics Engineers Inc., pp. 701-704, 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021, Virtual, Gainesville, United States, 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375295

A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning. / Wang, Haoran; Feng, Philip X.L.; Xie, Huikai.
34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 701-704 9375295 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Feng, Philip X.L.

AU - Xie, Huikai

PY - 2021/1/25

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N2 - One of the challenges for piezoelectric MEMS speakers is their relatively low sound pressure level (SPL) due to the relatively small piezoelectric constants of sol-gel or sputtered lead zirconate titanate (PZT). In this paper, we present a piezoelectric MEMS speaker with improved SPL that is enabled by high-piezoelectric-coefficient ceramic PZT as well as a dual-electrode configuration with phase tuning. A dual-electrode piezoelectric MEMS speaker based on 4 μm thin ceramic PZT has been designed and fabricated with top electrodes consisting of an inner circular-shaped electrode and an outer ring-shaped electrode. The maximum SPL at 9.7 kHz reaches 121 dB with both electrodes activated simultaneously. Measurements have also revealed that 180° is not always the optimal phase delay between the two driving signals to yield the highest SPL. Instead, the output SPL of the MEMS speaker changes significantly with the phase delay and is frequency dependent, peaking at different phase delays for different frequencies. The optimal phase delays in the frequency band from 600 Hz to 10 kHz have been obtained by phase tuning experiments, which shows 2 to 10 dB SPL improvement compared with the single-electrode driving method.

AB - One of the challenges for piezoelectric MEMS speakers is their relatively low sound pressure level (SPL) due to the relatively small piezoelectric constants of sol-gel or sputtered lead zirconate titanate (PZT). In this paper, we present a piezoelectric MEMS speaker with improved SPL that is enabled by high-piezoelectric-coefficient ceramic PZT as well as a dual-electrode configuration with phase tuning. A dual-electrode piezoelectric MEMS speaker based on 4 μm thin ceramic PZT has been designed and fabricated with top electrodes consisting of an inner circular-shaped electrode and an outer ring-shaped electrode. The maximum SPL at 9.7 kHz reaches 121 dB with both electrodes activated simultaneously. Measurements have also revealed that 180° is not always the optimal phase delay between the two driving signals to yield the highest SPL. Instead, the output SPL of the MEMS speaker changes significantly with the phase delay and is frequency dependent, peaking at different phase delays for different frequencies. The optimal phase delays in the frequency band from 600 Hz to 10 kHz have been obtained by phase tuning experiments, which shows 2 to 10 dB SPL improvement compared with the single-electrode driving method.

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KW - ceramic PZT

KW - dual-electrode

KW - phase tuning

KW - piezoelectric

KW - sound pressure level (SPL)

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M3 - Conference contribution

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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EP - 704

BT - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021

Y2 - 25 January 2021 through 29 January 2021

ER -

Wang H, Feng PXL, Xie H. A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 701-704. 9375295. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51782.2021.9375295

A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning

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