A compact MEMS-based wide-angle optical scanner

B. Yang, L. Zhou, X. Zhang, S. Koppal, H. Xie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Citations (Scopus)

Abstract

A compact laser scanner that scans approximately 90° has been demonstrated, which is enabled by an electrothermal MEMS mirror encapsulated in a 3D printed holder with a curved dome for optical amplification.

Original languageEnglish
Title of host publication2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781538607374
DOIs
Publication statusPublished - 26 Sept 2017
Externally publishedYes
Event22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States
Duration: 13 Aug 201717 Aug 2017

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
Country/TerritoryUnited States
CitySanta Fe
Period13/08/1717/08/17

Keywords

  • 3D printed holder
  • LIDAR
  • Wide-angle scanning
  • compact
  • lens

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