TY - GEN
T1 - A bi-directional large-stroke electrothermal MEMS mirror with minimal thermal and temporal drift
AU - Wang, W.
AU - Chen, Q.
AU - Wang, D.
AU - Zhou, L.
AU - Xie, H.
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/2/23
Y1 - 2017/2/23
N2 - This paper reports a novel bi-directional electrothermal MEMS mirror with its mirror plate's position insensitive to ambient temperature and stable over time. In contrast, the electrothermal MEMS mirrors demonstrated previously are unidirectional and the position of the mirror plate changes significantly with ambient temperature and drifts over time. The new MEMS mirror design has been fabricated and characterized. The bi-direction piston scan range reaches ±177 μm. The position of the released MEMS mirror plate is only 0.2 μm above the substrate surface, and changes merely 0.5 μm for a large ambient temperature change of 0-100°C. The temporal drift is just 0.7 μm over 600 hours. Both the thermal and temporal drift are reduced by nearly two orders of magnitude compared to previous unidirectional thermal bimorph MEMS mirrors.
AB - This paper reports a novel bi-directional electrothermal MEMS mirror with its mirror plate's position insensitive to ambient temperature and stable over time. In contrast, the electrothermal MEMS mirrors demonstrated previously are unidirectional and the position of the mirror plate changes significantly with ambient temperature and drifts over time. The new MEMS mirror design has been fabricated and characterized. The bi-direction piston scan range reaches ±177 μm. The position of the released MEMS mirror plate is only 0.2 μm above the substrate surface, and changes merely 0.5 μm for a large ambient temperature change of 0-100°C. The temporal drift is just 0.7 μm over 600 hours. Both the thermal and temporal drift are reduced by nearly two orders of magnitude compared to previous unidirectional thermal bimorph MEMS mirrors.
UR - http://www.scopus.com/inward/record.url?scp=85015760440&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2017.7863408
DO - 10.1109/MEMSYS.2017.7863408
M3 - Conference contribution
AN - SCOPUS:85015760440
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 331
EP - 334
BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Y2 - 22 January 2017 through 26 January 2017
ER -