@inproceedings{25af10cb9f4c4d16b5e530c62a53ad3c,
title = "A 45°-tilted 2-axis scanning micromirror integrated on a silicon optical bench for 3D endoscopic optical imaging",
abstract = "This paper presents a 2-axis electrothermal single-crystal-silicon (SCS) micromirror that is tilted 45° out of plane on a silicon optical bench (SiOB). The SiOB provides mechanical support and electrical wiring to the tilted 2-axis mirror as well as an aligned trench for assembling other optical components such as optical fibers. The tilt of the mirror is achieved with the bending of a set of stressed bimorph beams and the stop is provided by the silicon sidewall. The tilt angle can be precisely controlled by properly choosing the distance from the mirror frame to the silicon sidewall and the flexure bimorph length. The mirror plate is 0.72 mm × 0.72 mm and the footprint of the entire MEMS device is 2.22 mm × 1.25 mm. The measured maximum optical scan angles of the mirror are 40.0° in both x- and y-axis.",
author = "Can Duan and Wei Wang and Xiaoyang Zhang and Jinling Ding and Qiao Chen and Antonio Pozzi and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",
year = "2015",
month = feb,
day = "26",
doi = "10.1109/MEMSYS.2015.7051117",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "February",
pages = "948--951",
booktitle = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015",
address = "United States",
edition = "February",
}