@inproceedings{bc3bfb4313a84cc887f72f0e1e5b14e1,
title = "A 340GHz Cross-coupled Waveguide Filter Based on MEMS Process",
abstract = "In this paper, a waveguide bandpass filter (BPF) operating at 340 GHz based on micro-electro-mechanical systems (MEMS) process is designed. The filter uses a classic fourth-order cross-coupled structure. The negative coupling is realized by a TE 102 mode. To provide convenience for connection and measurement, two vertical transitions with the same height as the filter are designed on the upper and lower sides. The simulation results show that the filter has a center frequency of 341.2 GHz with a 3 dB FBW of 19.7 GHz. The average insertion loss (IL) of the passband is 0.7 dB, and the return loss is better than 15 dB. The influences of machining tolerance caused by the MEMS process on center frequency, bandwidth, and stopband rejection are also analyzed in this paper.",
keywords = "Bandpass filter (BPF), machining tolerance, micro-electro-mechanical systems (MEMS), terahertz",
author = "Yan Jin and Houjun Sun and Yu Xiao and Tan, {Wen Hao} and Song, {Zhi Peng}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 4th IEEE International Conference on Electronics Technology, ICET 2021 ; Conference date: 07-05-2021 Through 10-05-2021",
year = "2021",
month = may,
day = "7",
doi = "10.1109/ICET51757.2021.9450939",
language = "English",
series = "2021 IEEE 4th International Conference on Electronics Technology, ICET 2021",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "289--293",
booktitle = "2021 IEEE 4th International Conference on Electronics Technology, ICET 2021",
address = "United States",
}