@inproceedings{d7a46cff3bc546be9f78a872a8bba09a,
title = "A 2D electrothermal micromirror with feedback based on Hall-effect of piezoresistive sensors",
abstract = "In this paper, a new design of an electrothermal micromirror integrated with piezoresistive sensors is proposed. The micromirror is composed of four electrothermal bimorph actuators and four piezoresistive position sensors. In order to reduce the influence of temperature on piezoresistance, silicon dioxide can be used to thermally isolate the piezoresistive sensors from the silicon substrate. The optimized micromirror has a square mirror plate of 1800 ∗ 1800 μm and a footprint of 4040 ∗ 4040 μm, leading to a fill factor of 20%. The simulation results show that the optical fields of view of the micromirror are about 7° in the tilt and tip directions and the maximum piston displacement is close to 600 μm. The simulation results also show that the sensitivity and resolution of the piezoresistive sensors under a 3 V bias voltage are 2.88 mV/° and 0.4 μrad for the tip-tilt motion, respectively, and 0.056 mV/μm and 1.2 nm for the piston motion, respectively.",
keywords = "Feedback, Lateral shift-free (LSF), MEMS mirror, Piezoresistive sensor",
author = "Yue Tang and Jianhua Li and Lixin Xu and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2021 SPIE.; MOEMS and Miniaturized Systems XX 2021 ; Conference date: 06-03-2021 Through 11-03-2021",
year = "2021",
doi = "10.1117/12.2582654",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Hans Zappe and Wibool Piyawattanametha and Yong-Hwa Park",
booktitle = "MOEMS and Miniaturized Systems XX",
address = "United States",
}