A 2-axis electrothermal MEMS micro-scanner with torsional beam

Quentin A.A. Tanguy; Can Duan; Wei Wang; Huikai Xie; Sylwester Bargiel; Przemyslaw Struk; Philippe Lutz; Christophe Gorecki

doi:10.1109/OMN.2016.7565919

A 2-axis electrothermal MEMS micro-scanner with torsional beam

Quentin A.A. Tanguy, Can Duan, Wei Wang, Huikai Xie, Sylwester Bargiel, Przemyslaw Struk, Philippe Lutz, Christophe Gorecki

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

In this paper we introduce a 2-axis MEMS micro-scanner with large scanning range of frame (32°) and mirror (22°) using a compact and optimized electrothermal bimorph actuator and torsional beams to tip and tilt a dual-reflective mirror plate.

Original language	English
Title of host publication	2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781509010356
DOIs	https://doi.org/10.1109/OMN.2016.7565919
Publication status	Published - 13 Sept 2016
Externally published	Yes
Event	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore Duration: 31 Jul 2016 → 4 Aug 2016

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	2016-September
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Country/Territory	Singapore
City	Singapore
Period	31/07/16 → 4/08/16

Keywords

MOEMS
dry photoresist lamination
electrothermal micromirror
optical coherence tomography
torsion beam

Access to Document

10.1109/OMN.2016.7565919

Cite this

Tanguy, Q. A. A., Duan, C., Wang, W., Xie, H., Bargiel, S., Struk, P., Lutz, P., & Gorecki, C. (2016). A 2-axis electrothermal MEMS micro-scanner with torsional beam. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings Article 7565919 (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September). IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565919

@inproceedings{21cca8801a91477fa0b7443f01eb909b,

title = "A 2-axis electrothermal MEMS micro-scanner with torsional beam",

abstract = "In this paper we introduce a 2-axis MEMS micro-scanner with large scanning range of frame (32°) and mirror (22°) using a compact and optimized electrothermal bimorph actuator and torsional beams to tip and tilt a dual-reflective mirror plate.",

keywords = "MOEMS, dry photoresist lamination, electrothermal micromirror, optical coherence tomography, torsion beam",

author = "Tanguy, {Quentin A.A.} and Can Duan and Wei Wang and Huikai Xie and Sylwester Bargiel and Przemyslaw Struk and Philippe Lutz and Christophe Gorecki",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",

year = "2016",

month = sep,

day = "13",

doi = "10.1109/OMN.2016.7565919",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",

address = "United States",

}

Tanguy, QAA, Duan, C, Wang, W, Xie, H, Bargiel, S, Struk, P, Lutz, P & Gorecki, C 2016, A 2-axis electrothermal MEMS micro-scanner with torsional beam. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings., 7565919, International Conference on Optical MEMS and Nanophotonics, vol. 2016-September, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 31/07/16. https://doi.org/10.1109/OMN.2016.7565919

A 2-axis electrothermal MEMS micro-scanner with torsional beam. / Tanguy, Quentin A.A.; Duan, Can; Wang, Wei et al.
2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. IEEE Computer Society, 2016. 7565919 (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A 2-axis electrothermal MEMS micro-scanner with torsional beam

AU - Tanguy, Quentin A.A.

AU - Duan, Can

AU - Wang, Wei

AU - Xie, Huikai

AU - Bargiel, Sylwester

AU - Struk, Przemyslaw

AU - Lutz, Philippe

AU - Gorecki, Christophe

PY - 2016/9/13

Y1 - 2016/9/13

N2 - In this paper we introduce a 2-axis MEMS micro-scanner with large scanning range of frame (32°) and mirror (22°) using a compact and optimized electrothermal bimorph actuator and torsional beams to tip and tilt a dual-reflective mirror plate.

AB - In this paper we introduce a 2-axis MEMS micro-scanner with large scanning range of frame (32°) and mirror (22°) using a compact and optimized electrothermal bimorph actuator and torsional beams to tip and tilt a dual-reflective mirror plate.

KW - MOEMS

KW - dry photoresist lamination

KW - electrothermal micromirror

KW - optical coherence tomography

KW - torsion beam

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U2 - 10.1109/OMN.2016.7565919

DO - 10.1109/OMN.2016.7565919

M3 - Conference contribution

AN - SCOPUS:84990238161

T3 - International Conference on Optical MEMS and Nanophotonics

BT - 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings

PB - IEEE Computer Society

T2 - 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016

Y2 - 31 July 2016 through 4 August 2016

ER -

A 2-axis electrothermal MEMS micro-scanner with torsional beam

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Keywords

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