A 1mW dual-chopper amplifier for a 50-μg/√Hz monolithic CMOS-MEMS capacitive accelerometer

Deyou Fang*, Hongwei Qu, Huikai Xie

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

21 Citations (Scopus)

Abstract

This paper reports a novel dual-chopper amplifier (DCA) for CMOS-MEMS capacitive accelerometers. A DCA prototype integrated with a single-axis accelerometer has been fabricated using TSMC 0.35 μm CMOS process. The DCA achieves a 16 nV/√Hz input-referred noise at 20 Hz with a power dissipation of only 1 mW. The measured accelerometer noise floor is 50 μg/√Hz down to 5 Hz.

Original languageEnglish
Title of host publication2006 Symposium on VLSI Circuits, VLSIC - Digest of Technical Papers
Pages59-60
Number of pages2
Publication statusPublished - 2006
Externally publishedYes
Event2006 Symposium on VLSI Circuits, VLSIC - Honolulu, HI, United States
Duration: 15 Jun 200617 Jun 2006

Publication series

NameIEEE Symposium on VLSI Circuits, Digest of Technical Papers

Conference

Conference2006 Symposium on VLSI Circuits, VLSIC
Country/TerritoryUnited States
CityHonolulu, HI
Period15/06/0617/06/06

Keywords

  • CMOS-MEMS accelerometer
  • Dual-chopper amplifier
  • Low noise
  • Low power

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