Abstract
We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μ m at only 3.2 V. The two-dimensional MEMS mirror can achieve 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μ m, respectively.
| Original language | English |
|---|---|
| Article number | 6544566 |
| Pages (from-to) | 1478-1480 |
| Number of pages | 3 |
| Journal | IEEE Photonics Technology Letters |
| Volume | 25 |
| Issue number | 15 |
| DOIs | |
| Publication status | Published - 2013 |
| Externally published | Yes |
Keywords
- 3-D scan
- MEMS lens
- MEMS mirror
- confocal microscopy
- thermal actuation