(110) Silicon-based fiber coupling grooves

Cui Ping Jia; Wei Dong; Bao Kun Xu; Jing Ran Zhou; Dan Wang; Wei You Chen

(110) Silicon-based fiber coupling grooves

Cui Ping Jia^*, Wei Dong, Bao Kun Xu, Jing Ran Zhou, Dan Wang, Wei You Chen

^*Corresponding author for this work

Jilin University

Research output: Contribution to journal › Article › peer-review

Abstract

Two mutually vertical fibers coupling grooves are fabricated by using anisotropic etching of the (110) silicon in the KOH solution. It is difficult to design accurately to fix the fibers because non-standard V-grooves are formed. The dentate groove is devised which is composed of a series of the etched parallelogram pits in KOH solution. The size of the parallelogram is analyzed and designed according to anisotropic etching properties of silicon. There are some warps for the dentate groove fixing fibers because the different convexes have the disaccord of the undercuts. So the dentate groove is perfected by the rhombus compensation pattern. As a result, precisely fixing the fibers can be achieved.

Original language	English
Pages (from-to)	34-36
Number of pages	3
Journal	Bandaoti Guangdian/Semiconductor Optoelectronics
Volume	27
Issue number	1
Publication status	Published - Feb 2006
Externally published	Yes

Keywords

(110) silicon
Convex
Dentate groove
KOH

Cite this

Jia, C. P., Dong, W., Xu, B. K., Zhou, J. R., Wang, D., & Chen, W. Y. (2006). (110) Silicon-based fiber coupling grooves. Bandaoti Guangdian/Semiconductor Optoelectronics, 27(1), 34-36.

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abstract = "Two mutually vertical fibers coupling grooves are fabricated by using anisotropic etching of the (110) silicon in the KOH solution. It is difficult to design accurately to fix the fibers because non-standard V-grooves are formed. The dentate groove is devised which is composed of a series of the etched parallelogram pits in KOH solution. The size of the parallelogram is analyzed and designed according to anisotropic etching properties of silicon. There are some warps for the dentate groove fixing fibers because the different convexes have the disaccord of the undercuts. So the dentate groove is perfected by the rhombus compensation pattern. As a result, precisely fixing the fibers can be achieved.",

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T1 - (110) Silicon-based fiber coupling grooves

AU - Jia, Cui Ping

AU - Dong, Wei

AU - Xu, Bao Kun

AU - Zhou, Jing Ran

AU - Wang, Dan

AU - Chen, Wei You

PY - 2006/2

Y1 - 2006/2

N2 - Two mutually vertical fibers coupling grooves are fabricated by using anisotropic etching of the (110) silicon in the KOH solution. It is difficult to design accurately to fix the fibers because non-standard V-grooves are formed. The dentate groove is devised which is composed of a series of the etched parallelogram pits in KOH solution. The size of the parallelogram is analyzed and designed according to anisotropic etching properties of silicon. There are some warps for the dentate groove fixing fibers because the different convexes have the disaccord of the undercuts. So the dentate groove is perfected by the rhombus compensation pattern. As a result, precisely fixing the fibers can be achieved.

AB - Two mutually vertical fibers coupling grooves are fabricated by using anisotropic etching of the (110) silicon in the KOH solution. It is difficult to design accurately to fix the fibers because non-standard V-grooves are formed. The dentate groove is devised which is composed of a series of the etched parallelogram pits in KOH solution. The size of the parallelogram is analyzed and designed according to anisotropic etching properties of silicon. There are some warps for the dentate groove fixing fibers because the different convexes have the disaccord of the undercuts. So the dentate groove is perfected by the rhombus compensation pattern. As a result, precisely fixing the fibers can be achieved.

KW - (110) silicon

KW - Convex

KW - Dentate groove

KW - KOH

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M3 - Article

AN - SCOPUS:33645778021

SN - 1001-5868

VL - 27

SP - 34

EP - 36

JO - Bandaoti Guangdian/Semiconductor Optoelectronics

JF - Bandaoti Guangdian/Semiconductor Optoelectronics

IS - 1

ER -

(110) Silicon-based fiber coupling grooves

Abstract

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