数字全息中的自动相位畸变补偿算法

Translated title of the contribution: Automatic Phase-Distortion Compensation Algorithm in Digital Holography

Chao Gao, Yongfu Wen*, Haobo Cheng, Yingwei Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

A method for the automatic phase-distortion compensation in digital holography is proposed, in which the image segmentation technique is used to automatically segment the detected objects, thus a phase mask is generated, and the phase-distortion in areas without containing the detected object region is further obtained. The least-squares fitting of phase-distortion based on the phase-distortion correction model is done and the automatic phase-distortion compensation is eventually achieved. In experiments, a built-in digital holographic inspection platform is established and the wafer surface measurement is conducted. The results show that the proposed method can be used to automatically correct phase-distortion.

Translated title of the contributionAutomatic Phase-Distortion Compensation Algorithm in Digital Holography
Original languageChinese (Traditional)
Article number1209001
JournalGuangxue Xuebao/Acta Optica Sinica
Volume38
Issue number12
DOIs
Publication statusPublished - 10 Dec 2018

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