Abstract
A method for the automatic phase-distortion compensation in digital holography is proposed, in which the image segmentation technique is used to automatically segment the detected objects, thus a phase mask is generated, and the phase-distortion in areas without containing the detected object region is further obtained. The least-squares fitting of phase-distortion based on the phase-distortion correction model is done and the automatic phase-distortion compensation is eventually achieved. In experiments, a built-in digital holographic inspection platform is established and the wafer surface measurement is conducted. The results show that the proposed method can be used to automatically correct phase-distortion.
Translated title of the contribution | Automatic Phase-Distortion Compensation Algorithm in Digital Holography |
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Original language | Chinese (Traditional) |
Article number | 1209001 |
Journal | Guangxue Xuebao/Acta Optica Sinica |
Volume | 38 |
Issue number | 12 |
DOIs | |
Publication status | Published - 10 Dec 2018 |