On-chip micro-tribotester and its micro-fabrication

Zhanshe Guo; Chunfu Jiang; Yuxiao Zhang; Dezhi Zheng

On-chip micro-tribotester and its micro-fabrication

Zhanshe Guo^*, Chunfu Jiang, Yuxiao Zhang, Dezhi Zheng

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科研成果: 期刊稿件 › 文章 › 同行评审

摘要

An on-chip micro-tribotester was designed and fabricated to simulate the tribolgical properties for the lateral contact surfaces of MEMS devices. The loading structure, testing part and force sensors were all integrated on a single chip by bulk silicon technology and bonding process. It is verified from the tested results that the static frictional coefficient between the contact pairs is 0.9 and dynamic frictional coefficient varies with normal force.

源语言	英语
页（从-至）	2539-2542
页数	4
期刊	Zhongguo Jixie Gongcheng/China Mechanical Engineering
卷	18
期	21
出版状态	已出版 - 10 11月 2007
已对外发布	是

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On-chip micro-tribotester and its micro-fabrication

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