Abstract
Generation of continuous gray levels in three-dimensional diffractive optical elements has remained a challenge with the current semiconductor microfabrication method. In this letter, the authors propose and demonstrate the use of the two-photon polymerization method for fabricating three-dimensional diffractive optical elements of continuous gray levels. This method is a mask-free and low-cost single-step process. It is shown that the multilevel-phase-encoded diffractive optical element fabricated in inorganic-organic hybrid polymer material facilitates the intensity distribution synthesis with a high diffraction efficiency approaching the theoretical limit.
Original language | English |
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Article number | 073503 |
Journal | Applied Physics Letters |
Volume | 90 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2007 |
Externally published | Yes |