Threshold values analysis of substrate parameters based on MEMS microstrip filter

Gang Wang*, Lixin Xu, Ting Wang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

High frequency filters are important components in microwave facilities application. With miniature volume, high performance and integratability, MEMS microstrip filter can significantly improve performance of Radio frequency system. By calculating chebyshev coupled microstrip bandpass filter design scheme, Threshold values of MEMS microstrip substrate parameters are defined to analyze dimensions variation property of MEMS microstrip filter relates with substrate parameters. Selection principle of substrate parameters for MEMS microstrip filter is presented, which indicates thickness and relative dielectric constant of substrate should not exceed the threshold values. The principle of threshold values can be applied as a guide on research and application of MEMS microstrip filter.

Original languageEnglish
Title of host publicationMEMS/NEMS Nano Technology
PublisherTrans Tech Publications Ltd.
Pages745-749
Number of pages5
ISBN (Print)9783037851753
DOIs
Publication statusPublished - 2011

Publication series

NameKey Engineering Materials
Volume483
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Keywords

  • MEMS
  • Microstrip filter
  • Substrate
  • Threshold values

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