@inproceedings{a925a4fede674ec084460aabbe227260,
title = "Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength",
abstract = "An improved compact digital holographic microscope (ICDHM) is developed for three-dimensional imaging of microstructures. This system is based on lensless magnification using a diverging wave. A point source generated by a long working distance microscope objective is located into the cube beam-splitter to get a higher numerical aperture (NA) of the system. The lateral resolution and the field-of-view of the system are confirmed with a calibration experiment. For the case of the optical path lengths (OPL) of object with step pattern larger than the wavelength, the traditional phase unwrapping algorithms cannot be unequivocally determinate, resulting in a 2π phase ambiguity. To solve this problem, dual wavelength phase unwrapping method was integrated into ICDHM, which extends the measuring capability of ICDHM over several microns of range. The experimental results demonstrate that the developed system is well suitable for the measurement of MEMS and Micro systems samples with high resolution.",
keywords = "Digital holography microscopy, Dual wavelength, MEMS, Three-dimension measurement",
author = "Yongfu Wen and Weijuan Qu and Haobo Cheng and Anand Asundi",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; 3rd International Conference on Optical and Photonic Engineering, icOPEN 2015 ; Conference date: 14-04-2015 Through 16-04-2015",
year = "2015",
doi = "10.1117/12.2190197",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Yu Fu and Asundi, {Anand K.}",
booktitle = "International Conference on Optical and Photonic Engineering, icOPEN 2015",
address = "United States",
}