TY - GEN
T1 - Thermal microscope imaging system for semiconductor device and IC invalidation analysis
AU - Gao, Meijing
AU - Jin, Weiqi
AU - Chen, Yinan
AU - Wang, Xia
PY - 2008
Y1 - 2008
N2 - In order to analyze the invalidation of the Semiconductor Device and IC, we proposed a novel digital thermal microscope based on the uncooled focal plane detector. We give the operating principle, system's construction and the mathematical mode of noise equivalent temperature difference (NETD). Based on the mathematical model, some measures were taken to increase the system temperature resolution. Furthermore we proposed an adaptive nonuniformity correction algorithm for the UFPA. The software for the thermal microscope is provided based on Visual C++. Results of real thermal image experiments have shown that the digital thermal microscope is designed successfully and achieves good performance. Thus it will become an effective means for invalidation Analysis. This method is a novel and unique contribution to field of semiconductor device and IC invalidation analysis.
AB - In order to analyze the invalidation of the Semiconductor Device and IC, we proposed a novel digital thermal microscope based on the uncooled focal plane detector. We give the operating principle, system's construction and the mathematical mode of noise equivalent temperature difference (NETD). Based on the mathematical model, some measures were taken to increase the system temperature resolution. Furthermore we proposed an adaptive nonuniformity correction algorithm for the UFPA. The software for the thermal microscope is provided based on Visual C++. Results of real thermal image experiments have shown that the digital thermal microscope is designed successfully and achieves good performance. Thus it will become an effective means for invalidation Analysis. This method is a novel and unique contribution to field of semiconductor device and IC invalidation analysis.
KW - Digital thermal microscope
KW - Invalidation analysis
KW - Uncooled focal plane detector
UR - http://www.scopus.com/inward/record.url?scp=41149169097&partnerID=8YFLogxK
U2 - 10.1117/12.790776
DO - 10.1117/12.790776
M3 - Conference contribution
AN - SCOPUS:41149169097
SN - 9780819467638
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - International Symposium on Photoelectronic Detection and Imaging 2007
T2 - International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Photoelectronic Imaging and Detection
Y2 - 9 September 2007 through 12 September 2007
ER -