Synthesis of Si3N4/polyimide hybrid films

Yuquan Wen; Yihe Zhang; Wei Zhen; Qingsong Su; Lihang Zhao

Synthesis of Si₃N₄/polyimide hybrid films

Yuquan Wen^*, Yihe Zhang, Wei Zhen, Qingsong Su, Lihang Zhao

^*Corresponding author for this work

School of Mechatronical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Si₃N₄/polyimide hybrid films based on 4,4-oxydianiline (ODA) and pyromellitic dianhydride(PMDA) were prepared by incorporation with different content of nano-sized Si₃N₄. In this study, the effect of Si₃N₄ on the microstructure of the Si₃N₄/polyimide film was characterized by Fourier Transform Infrared Spectrometry (FTIR), scanning electron microscope (SEM). The dependence of mechanical properties and thermal stability of the Si ₃N₄/polyimide film were also investigated. The hardness from unload of the Si₃N₄/polyimide film were expressly investigated for the first time.

Original language	English
Title of host publication	Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures
Publisher	Trans Tech Publications
Pages	984-986
Number of pages	3
ISBN (Print)	0878493786, 9780878493784
Publication status	Published - 2008
Event	Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures - Hong Kong, P.R., China Duration: 28 Jul 2008 → 31 Jul 2008

Publication series

Name	Advanced Materials Research
Volume	47-50 PART 2
ISSN (Print)	1022-6680

Conference

Conference	Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures
Country/Territory	China
City	Hong Kong, P.R.
Period	28/07/08 → 31/07/08

Keywords

Hybrid film
Polyimide
SiN
Synthesis

Cite this

@inproceedings{acf85ff795e2498faba996c39ec7b3ae,

title = "Synthesis of Si3N4/polyimide hybrid films",

abstract = "Si3N4/polyimide hybrid films based on 4,4-oxydianiline (ODA) and pyromellitic dianhydride(PMDA) were prepared by incorporation with different content of nano-sized Si3N4. In this study, the effect of Si3N4 on the microstructure of the Si3N4/polyimide film was characterized by Fourier Transform Infrared Spectrometry (FTIR), scanning electron microscope (SEM). The dependence of mechanical properties and thermal stability of the Si 3N4/polyimide film were also investigated. The hardness from unload of the Si3N4/polyimide film were expressly investigated for the first time.",

keywords = "Hybrid film, Polyimide, SiN, Synthesis",

author = "Yuquan Wen and Yihe Zhang and Wei Zhen and Qingsong Su and Lihang Zhao",

year = "2008",

language = "English",

isbn = "0878493786",

series = "Advanced Materials Research",

publisher = "Trans Tech Publications",

pages = "984--986",

booktitle = "Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures",

address = "Germany",

note = "Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures ; Conference date: 28-07-2008 Through 31-07-2008",

}

Wen, Y, Zhang, Y, Zhen, W, Su, Q & Zhao, L 2008, Synthesis of Si₃N₄/polyimide hybrid films. in Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures. Advanced Materials Research, vol. 47-50 PART 2, Trans Tech Publications, pp. 984-986, Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures, Hong Kong, P.R., China, 28/07/08.

Synthesis of Si₃N₄/polyimide hybrid films. / Wen, Yuquan; Zhang, Yihe; Zhen, Wei et al.
Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures. Trans Tech Publications, 2008. p. 984-986 (Advanced Materials Research; Vol. 47-50 PART 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Synthesis of Si3N4/polyimide hybrid films

AU - Wen, Yuquan

AU - Zhang, Yihe

AU - Zhen, Wei

AU - Su, Qingsong

AU - Zhao, Lihang

PY - 2008

Y1 - 2008

N2 - Si3N4/polyimide hybrid films based on 4,4-oxydianiline (ODA) and pyromellitic dianhydride(PMDA) were prepared by incorporation with different content of nano-sized Si3N4. In this study, the effect of Si3N4 on the microstructure of the Si3N4/polyimide film was characterized by Fourier Transform Infrared Spectrometry (FTIR), scanning electron microscope (SEM). The dependence of mechanical properties and thermal stability of the Si 3N4/polyimide film were also investigated. The hardness from unload of the Si3N4/polyimide film were expressly investigated for the first time.

AB - Si3N4/polyimide hybrid films based on 4,4-oxydianiline (ODA) and pyromellitic dianhydride(PMDA) were prepared by incorporation with different content of nano-sized Si3N4. In this study, the effect of Si3N4 on the microstructure of the Si3N4/polyimide film was characterized by Fourier Transform Infrared Spectrometry (FTIR), scanning electron microscope (SEM). The dependence of mechanical properties and thermal stability of the Si 3N4/polyimide film were also investigated. The hardness from unload of the Si3N4/polyimide film were expressly investigated for the first time.

KW - Hybrid film

KW - Polyimide

KW - SiN

KW - Synthesis

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M3 - Conference contribution

AN - SCOPUS:56349145119

SN - 0878493786

SN - 9780878493784

T3 - Advanced Materials Research

SP - 984

EP - 986

BT - Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures

PB - Trans Tech Publications

T2 - Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures

Y2 - 28 July 2008 through 31 July 2008

ER -