Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses

Iaroslav Gnilitskyi; Vitaly Gruzdev; Xiaoqing He; Olga Sergaeva; Pengfei Ji; Tommi White; Yuwen Zhang

Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses

Iaroslav Gnilitskyi^*, Vitaly Gruzdev, Xiaoqing He, Olga Sergaeva, Pengfei Ji, Tommi White, Yuwen Zhang

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

Original language	English
Title of host publication	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781943580453
Publication status	Published - 2 Jul 2018
Externally published	Yes
Event	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 - Wanchai, Hong Kong Duration: 29 Jul 2018 → 3 Aug 2018

Publication series

Name	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

Conference

Conference	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
Country/Territory	Hong Kong
City	Wanchai
Period	29/07/18 → 3/08/18

Cite this

Gnilitskyi, I., Gruzdev, V., He, X., Sergaeva, O., Ji, P., White, T., & Zhang, Y. (2018). Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. In 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 Article 8699886 (2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018). Institute of Electrical and Electronics Engineers Inc..

Gnilitskyi, Iaroslav ; Gruzdev, Vitaly ; He, Xiaoqing et al. / Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018. Institute of Electrical and Electronics Engineers Inc., 2018. (2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018).

@inproceedings{7cc060ef4f414a29a8cddaaffb34c490,

title = "Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses",

abstract = "Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.",

author = "Iaroslav Gnilitskyi and Vitaly Gruzdev and Xiaoqing He and Olga Sergaeva and Pengfei Ji and Tommi White and Yuwen Zhang",

note = "Publisher Copyright: {\textcopyright} 2018 OSA.; 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 ; Conference date: 29-07-2018 Through 03-08-2018",

year = "2018",

month = jul,

day = "2",

language = "English",

series = "2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018",

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Gnilitskyi, I, Gruzdev, V, He, X, Sergaeva, O, Ji, P, White, T & Zhang, Y 2018, Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. in 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018., 8699886, 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018, Institute of Electrical and Electronics Engineers Inc., 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018, Wanchai, Hong Kong, 29/07/18.

Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. / Gnilitskyi, Iaroslav; Gruzdev, Vitaly; He, Xiaoqing et al.
2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018. Institute of Electrical and Electronics Engineers Inc., 2018. 8699886 (2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses

AU - Gnilitskyi, Iaroslav

AU - Gruzdev, Vitaly

AU - He, Xiaoqing

AU - Sergaeva, Olga

AU - Ji, Pengfei

AU - White, Tommi

AU - Zhang, Yuwen

PY - 2018/7/2

Y1 - 2018/7/2

N2 - Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

AB - Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

UR - http://www.scopus.com/inward/record.url?scp=85065608258&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85065608258

T3 - 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

BT - 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

Y2 - 29 July 2018 through 3 August 2018

ER -

Gnilitskyi I, Gruzdev V, He X, Sergaeva O, Ji P, White T et al. Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. In 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018. Institute of Electrical and Electronics Engineers Inc. 2018. 8699886. (2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018).

Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses

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