@inproceedings{7cc060ef4f414a29a8cddaaffb34c490,
title = "Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses",
abstract = "Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.",
author = "Iaroslav Gnilitskyi and Vitaly Gruzdev and Xiaoqing He and Olga Sergaeva and Pengfei Ji and Tommi White and Yuwen Zhang",
note = "Publisher Copyright: {\textcopyright} 2018 OSA.; 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 ; Conference date: 29-07-2018 Through 03-08-2018",
year = "2018",
month = jul,
day = "2",
language = "English",
series = "2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018",
address = "United States",
}