Sub-aperture image stitching of cylindrical mirror surface defects based on dark-field imaging

Zhang Nansheng, Wang Shanshan, Xu Bowen, Zhu Qiudong, Hao Qun

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

High-precision cylindrical lens optics are widely used in high-precision equipment, such as high-power laser resonators and long-distance line interferometers. In most instances, this lens required to possess extremely low surface roughness and surface defects. Using dark-field microscopy to detect the surface defects of the cylindrical mirror is simpler than the interferometric, and the cost is lower. In the experiment, we designed a set of image acquisition devices based on the characteristics of the cylindrical mirrors, and used this device to obtain overlapping sub-aperture images of the cylindrical mirrors. According to the overlapping area to solve the relative position relationship of two adjacent sub-apertures, an image stitching algorithm based on defect location is proposed, which realizes the stitching of multiple sub-apertures. The experimental system was used to scan a plano-convex cylindrical mirror with a size of 22mm×22mm and a radius of curvature of 41.34mm. Splicing the obtained sub-aperture images of surface defects. Experiments show that the stitching algorithm has high matching accuracy and strong robustness.

Original languageEnglish
Title of host publicationAOPC 2020
Subtitle of host publicationOptics Ultra Precision Manufacturing and Testing
EditorsLingbao Kong, Dawei Zhang, Xichun Luo
PublisherSPIE
ISBN (Electronic)9781510639577
DOIs
Publication statusPublished - 2020
Event2020 Applied Optics and Photonics China: Optics Ultra Precision Manufacturing and Testing, AOPC 2020 - Shanghai, China
Duration: 29 Jun 202030 Jun 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11568
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference2020 Applied Optics and Photonics China: Optics Ultra Precision Manufacturing and Testing, AOPC 2020
Country/TerritoryChina
CityShanghai
Period29/06/2030/06/20

Keywords

  • Cylindrical mirror
  • Defect detection
  • Sub-aperture stitching

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