Study of a novel bi-stable and easy integrated MEMS ETBS

Yue Zhao*, Wenzhong Lou, Dongguang Li

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Citations (Scopus)

Abstract

This paper presents a novel bi-stable and integrated single use MEMS blowout switch based on electro-thermal theory. The switch mechanically breaks a metallic line. Switching between the two stable states is accomplished by a DC signal through an integrated heating resistance underneath the electrical lines to be melted. Some key features are that switches are bi-stable, integratable and IC compatible. They are compatible with various voltages operation for different applications, operation in ambient environment may be possible; predicted lifetime is very long and therefore both switches can be used for long life systems. Batch fabrication using planar processing methods is used. The ETBS could be manufacture easily in great amount. The switch can also be applied in some areas of high-energy control such as initiation security and self-control in failure.

Original languageEnglish
Title of host publication2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Pages257-260
Number of pages4
DOIs
Publication statusPublished - 2012
Event7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
Duration: 5 Mar 20128 Mar 2012

Publication series

Name2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Conference

Conference7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Country/TerritoryJapan
CityKyoto
Period5/03/128/03/12

Keywords

  • ETBS
  • MEMS
  • bi-stable
  • electro-thermal

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