@inproceedings{67c786b7f5944ab6853057b0ea39b862,
title = "Stiffness-Tunable Microstructures Based on Electrothermal Bimorph Beams",
abstract = "Robust and light-weighted microstructures are highly desired for various MEMS devices. Thin-film structures are light-weighted, but often suffer from low stiffness. In this abstract, a microstructure with tunable and enhanced stiffness is proposed for the first time. The stiffness-tunable microstructure is based on an electrothermal bimorph beam with an arched transverse cross-section. The concept, exemplified structure design and fabrication method of the proposed structure are presented. Both simulation and test results show that the stiffness of such a structure can be continuously changed more than 25 times by tuning the applied voltage from 0 to 7 V. This method provides a simple approach to stiffen thin-film microstructures.",
keywords = "Thin-film beam, electrothermal bimorph, stiffness enhancement, tunable stiffness",
author = "Lei Xiao and Yingtao Ding and Peng Wang and Hengzhang Yang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",
year = "2021",
month = jan,
day = "25",
doi = "10.1109/MEMS51782.2021.9375223",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "79--82",
booktitle = "34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021",
address = "United States",
}