Shear stress sensor in micro-channel

Zhao Hui Yao; Qi Ming Ge; Ying Tao Ding; Peng Fei Hao

Shear stress sensor in micro-channel

Zhao Hui Yao^*, Qi Ming Ge, Ying Tao Ding, Peng Fei Hao

^*Corresponding author for this work

Tsinghua University

Research output: Contribution to journal › Article › peer-review

Abstract

A shear stress sensor based on heat transfer principle has been developed in a micro channel A silicon wafer with micro channels and a pyrex glass with hot films have been bonded to form this sensor. The temperature coefficient of resistance is measured and over heat ratios with various input powers are determined. Square waves are superimposed on a constant bias current to determine the time constants under diversiform over heat ratios. Calibration has been conducted and shear stresses versus pressure difference have been tested.

Original language	English
Pages (from-to)	713-716
Number of pages	4
Journal	Chinese Journal of Sensors and Actuators
Volume	18
Issue number	4
Publication status	Published - Dec 2005
Externally published	Yes

Keywords

Micro-channel
Sensor
Shear stress

Cite this

Yao, Z. H., Ge, Q. M., Ding, Y. T., & Hao, P. F. (2005). Shear stress sensor in micro-channel. Chinese Journal of Sensors and Actuators, 18(4), 713-716.

@article{21db7f1a269a49b5801d9e8b69c171b9,

title = "Shear stress sensor in micro-channel",

abstract = "A shear stress sensor based on heat transfer principle has been developed in a micro channel A silicon wafer with micro channels and a pyrex glass with hot films have been bonded to form this sensor. The temperature coefficient of resistance is measured and over heat ratios with various input powers are determined. Square waves are superimposed on a constant bias current to determine the time constants under diversiform over heat ratios. Calibration has been conducted and shear stresses versus pressure difference have been tested.",

keywords = "Micro-channel, Sensor, Shear stress",

author = "Yao, {Zhao Hui} and Ge, {Qi Ming} and Ding, {Ying Tao} and Hao, {Peng Fei}",

year = "2005",

month = dec,

language = "English",

volume = "18",

pages = "713--716",

journal = "Chinese Journal of Sensors and Actuators",

issn = "1004-1699",

publisher = "Guojia Jiaowei Quanguo Gaoxiao Chuangan Jishu Yanjiuhui",

number = "4",

}

TY - JOUR

T1 - Shear stress sensor in micro-channel

AU - Yao, Zhao Hui

AU - Ge, Qi Ming

AU - Ding, Ying Tao

AU - Hao, Peng Fei

PY - 2005/12

Y1 - 2005/12

N2 - A shear stress sensor based on heat transfer principle has been developed in a micro channel A silicon wafer with micro channels and a pyrex glass with hot films have been bonded to form this sensor. The temperature coefficient of resistance is measured and over heat ratios with various input powers are determined. Square waves are superimposed on a constant bias current to determine the time constants under diversiform over heat ratios. Calibration has been conducted and shear stresses versus pressure difference have been tested.

AB - A shear stress sensor based on heat transfer principle has been developed in a micro channel A silicon wafer with micro channels and a pyrex glass with hot films have been bonded to form this sensor. The temperature coefficient of resistance is measured and over heat ratios with various input powers are determined. Square waves are superimposed on a constant bias current to determine the time constants under diversiform over heat ratios. Calibration has been conducted and shear stresses versus pressure difference have been tested.

KW - Micro-channel

KW - Sensor

KW - Shear stress

UR - http://www.scopus.com/inward/record.url?scp=29144437270&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:29144437270

SN - 1004-1699

VL - 18

SP - 713

EP - 716

JO - Chinese Journal of Sensors and Actuators

JF - Chinese Journal of Sensors and Actuators

IS - 4

ER -

Shear stress sensor in micro-channel

Abstract

Keywords

Other files and links

Fingerprint

Cite this