Sensitivity-compensated micro-pressure flexible sensor for aerospace vehicle

When flight vehicles (e.g., aerospace vehicles, Low Earth Orbit (LEO) satellites, near-space aircrafts, Unmanned Aerial Vehicles (UAVs) and drones) fly at high speed, their surfaces suffer the micro-pressure from high-altitude thin air. The long-term effect of this pressure causes the surface components of flight vehicle to deform or fall off, which can lead to a serious accident. To solve this problem, this paper proposes a sensitivity-compensated micro-pressure flexible sensor based on hyper-elastic plastic material and plate parallel capacitance. The sensor is able to measure a range of 0–6 kPa micro-pressure suffered by the flight vehicle’s surface with high sensitivity and flexible devices. In this paper, we propose the principle, structure design and fabrication of the sensitivity-compensated micro-pressure flexible sensor. We carried out experiments to obtain the static characteristic curve between micro-pressure and the output capacitance of the sensor devices, and investigated the relationship between sensitivity and geometric parameters. We also compared the performance of the flexible sensor before and after sensitivity compensation. The result shows that the sensor can measure a range of 0–2 kPa and 2–6 kPa with a sensitivity of 0.27 kPa⁻¹ and 0.021 kPa⁻¹, which are 80% and 141.38% higher than the sensor before compensation; a linearity of 1.39% and 2.88%, which are 51.7% and 13.1% higher than the sensor before compensation; and a hysteresis and repeatability of 4.95% and 2.38%, respectively. The sensor has potential applications in flight vehicles to measure the micro-pressure with high sensitivity and flexibility.