Research on relativistic Rutherford formula for high-energy electron beam lithography

Guo Rong Zhao, Yan Qiu Li

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	5
Number of pages	1
Journal	Weixi Jiagong Jishu/Microfabrication Technology
Issue number	3
Publication status	Published - Sept 2004
Externally published	Yes

Cite this

@article{877e4ef278f44d3baca96251ea186eaf,

title = "Research on relativistic Rutherford formula for high-energy electron beam lithography",

author = "Zhao, {Guo Rong} and Li, {Yan Qiu}",

year = "2004",

month = sep,

language = "English",

pages = "5",

journal = "Weixi Jiagong Jishu/Microfabrication Technology",

issn = "1003-8213",

publisher = "Weixi Jiagong Jishu",

number = "3",

}

TY - JOUR

T1 - Research on relativistic Rutherford formula for high-energy electron beam lithography

AU - Zhao, Guo Rong

AU - Li, Yan Qiu

PY - 2004/9

Y1 - 2004/9

UR - http://www.scopus.com/inward/record.url?scp=7244260301&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:7244260301

SN - 1003-8213

SP - 5

JO - Weixi Jiagong Jishu/Microfabrication Technology

JF - Weixi Jiagong Jishu/Microfabrication Technology

IS - 3

ER -